Electrolytic Jig Elastic Terminals Uniform Processing
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Solution Overview
Problem
Conventional electrolytic processing apparatuses require large-scale ultrasonic agitating devices to ensure uniformity, which is not feasible due to configuration limitations, hindering efficient and appropriate processing.
Innovation Solution
An electrolytic processing jig with a flat base body, elastic terminals for secure contact with the substrate's peripheral portion, and a detecting unit to ensure uniform contact and voltage application, eliminating the need for a large-scale agitating device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a large-scale ultrasonic agitating device is used to agitate the processing liquid, then uniformity of the electrolytic processing is improved, but the device complexity and apparatus configuration become infeasible
Solution Approach 1:
The patent extracts the agitating function from a separate large-scale ultrasonic agitating device and integrates it into the electrolytic processing jig itself through elastic terminals that contact the substrate periphery. This eliminates the need for a complex external agitating device while maintaining processing uniformity.
Solution Approach 2:
The elastic terminals serve as an intermediary mechanism between the electrolytic processing system and the substrate periphery. By contacting the substrate periphery and being elastically deformable, they transmit mechanical influence to agitate the processing liquid without requiring a dedicated agitating device.
2Reliability
If elastic terminals are used to contact the substrate periphery, then contact reliability is improved, but the detecting unit complexity increases
Solution Approach 1:
The detecting unit is designed to perform multiple functions: it detects both the contact state of the elastic terminals with the substrate and provides electrical connection for the electrolytic processing. This multi-functionality reduces overall system complexity despite the added detection capability.
Solution Approach 2:
The elastic terminals inherently provide both mechanical contact for agitation and electrical conduction for processing. The detecting unit leverages the existing electrical properties of the terminals and substrate interface to detect contact state without requiring separate sensing mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and appropriate electrolytic processing without the need for a large-scale agitating device, ensuring uniformity and simplifying the apparatus configuration.
Implementation Method 1
a detecting unit configured to electrically detect a contact of at least one of the terminals with the processing target substrate
Implementation Method 2
three or more terminals provided at the base body, each having elasticity and configured to be brought into contact with a peripheral portion of the processing target substrate
Implementation Method 3
by applying a voltage between the electrode and the processing target substrate in a state that a processing liquid is supplied between the electrode and the processing target substrate, the electrolytic processing is performed on the processing target substrate
Data Source
AI summary
An electrolytic processing jig configured to perform an electrolytic processing on a processing target substrate includes a base body having a flat plate shape; an electrode provided at the base body; three or more terminals provided at the base body, each having elasticity and configured to be brought into contact with a peripheral portion of the processing target substrate; and a detecting unit configured to electrically detect a contact of at least one of the terminals with the processing target substrate.