Electromagnetic Awning Protection Device for Semiconductor Equipment

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Solution Overview

Problem

Current protection devices in semiconductor wafer fabrication factories, which rely on manual operation, cannot expand their awnings without electricity, leaving equipment vulnerable to water and dust intrusion during earthquakes when power is lost.

Innovation Solution

A protection device with an electromagnetic system that uses a power supply unit to keep an awning in a retracted state, which automatically expands when power is cut, using gravity and magnetic forces to cover equipment, and integrates an earthquake sensor to autonomously initiate this expansion during seismic events.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If manual operation is used to expand the awning, then the equipment can be protected when electricity is available, but the awning cannot be expanded when power is lost during earthquakes

Engineering Contradiction:
Improveequipment protection reliabilityVSAvoidautomatic operation capability
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The electromagnetic device normally holds the awning in a retracted state, and when power is cut during an earthquake, the electromagnetic attraction disappears, allowing the awning to automatically expand under the action of springs. This inverts the traditional control logic where power is needed to activate movement, instead using power loss to trigger the protective action.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The system uses the earthquake-induced power loss itself as the trigger signal to activate the protective mechanism. The springs and counterweights automatically drive the awning expansion without requiring external control or manual operation, making the system self-activating in response to the hazardous condition.

Inventive Principle:
Principle #25Self-service

2Ease of operation

If the awning is kept in a retracted state using electromagnetic force, then the equipment remains accessible, but the system requires continuous electrical power

Engineering Contradiction:
Improveequipment accessibilityVSAvoidcontinuous power consumption
Core Design Contradiction:
Ease of operationVSUse of energy by moving object

Solution Approach 1:

The electromagnetic device operates periodically or intermittently to maintain the awning in the retracted state, rather than requiring continuous power. When power is available, it periodically engages to hold the position, and when power is lost, the mechanical spring system takes over to enable automatic expansion.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

Springs and counterweights are used to balance the electromagnetic holding force, reducing the continuous energy requirement. The mechanical energy storage elements compensate for the electromagnetic force, allowing the system to maintain position with minimal power while enabling automatic movement when power is lost.

Inventive Principle:
Principle #8Anti-weight (Counterweight)

3Reliability

If the awning is automatically expanded using springs and counterweights, then the system works without power, but the structure becomes more complex

Engineering Contradiction:
Improveoperation without electricityVSAvoidmechanical structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The awning structure is divided into multiple independent segments or panels that can expand sequentially or independently. Each segment has its own spring and counterweight mechanism, allowing the system to achieve automatic expansion without requiring a single complex centralized mechanism.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system transitions from a static electromagnetic holding mechanism to a dynamic mechanical expansion system. The springs and counterweights are designed to engage only when needed (during power loss), allowing the structure to remain simple during normal operation and become protective only when required.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Ensures equipment protection from water and dust intrusion by automatically expanding the awning during earthquakes, meeting fire safety regulations and preventing damage, even in the absence of human operation.

Implementation Method 1

The power supply unit provides electrical power to the electromagnetic device, so that the electromagnetic device attracts the roller, and the awning remains in the received state

Methodology Applied
Scientific EffectElectromagnetic force: Electromagnet

Implementation Method 2

When the power supply unit stops providing electrical power to the electromagnetic device, the roller moves along the supporting member due to gravity, and the awning is expanded to cover the equipment

Methodology Applied
Scientific EffectGravity: Gravitation

Data Source

PatentUS10066412B2Equipment protection system and protection device thereof
Publication Date: 2018.09.04 WINBOND ELECTRONICS CORP
  • US10066412B2 patent drawing
  • US10066412B2 patent drawing
  • US10066412B2 patent drawing

AI summary

A protection device is provided, including a first fixed member, a second fixed member, a supporting member, a roller, an awning, an electromagnetic device, and a power supply unit. The supporting member connects to the first and second fixed members. The roller is movably disposed on the supporting member. The power supply unit provides electrical power to the electromagnetic device, so that the electromagnetic device attracts the roller, and the awning remains in a received state. When the power supply unit stops providing electrical power to the electromagnetic device, the roller moves along the supporting member, and the awning is expanded to cover the equipment.