Electromagnetic Pressure Map Measurement for Wafer Bonding
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Solution Overview
Problem
Current methods for measuring pressure distribution in wafer bonding processes are either time-consuming, temperature-sensitive, unreliable, or costly, and do not allow for in-situ measurement, leading to inefficiencies and inaccuracies in pressure homogeneity assessment.
Innovation Solution
A measuring device and method that utilize electromagnetic waves to measure physical parameters before, during, and after compressive loading, allowing for the determination of pressure maps in-situ by correlating changes in optical properties of a measurement layer with pressure conditions, using techniques like Radon transform for mathematical analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If color balls bursting method is used to measure pressure distribution, then pressure map can be obtained, but the process is time-consuming and material cannot be used under thermal loading
Solution Approach 1:
The patent replaces mechanical pressure sensing methods (color balls, film cutting) with electromagnetic wave-based optical measurement. Electromagnetic waves pass through the measurement layer and their properties change according to pressure distribution, enabling non-contact, in-situ measurement without physical film manipulation or thermal sensitivity issues.
Solution Approach 2:
The patent introduces electromagnetic waves as an intermediary medium to measure pressure distribution. Instead of directly contacting pressure-sensitive materials that need to be cut and installed, the electromagnetic waves traverse the measurement layer, carrying pressure information through changes in their properties (intensity, polarization, wavelength).
2Measurement precision
If hundreds of locally distributed pressure sensors are used, then accurate pressure map can be obtained, but device complexity and production cost increase significantly
Solution Approach 1:
The patent segments the measurement layer into multiple regions, each capable of providing localized pressure information. By using multiple electromagnetic wave paths (signal routes) that traverse different regions of the measurement layer, the system obtains distributed pressure data without requiring physical segmentation into hundreds of individual sensors.
Solution Approach 2:
The measurement layer serves multiple functions simultaneously: it acts as both the object being measured and the transmission medium for electromagnetic waves. The same layer that experiences pressure also carries the optical signals, eliminating the need for separate sensor elements and reducing overall device complexity.
3Stress or pressure
If graphite compensation disks are used to improve pressure homogeneity, then elasticity matching is achieved, but temperature stability and material consumption are affected
Solution Approach 1:
The patent replaces mechanical compensation methods (graphite disks) with electromagnetic wave-based measurement. Instead of using special materials to match elasticity and compensate for pressure inhomogeneities, the system uses electromagnetic waves to detect and map the actual pressure distribution, allowing for post-processing correction without physical compensation components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise, in-situ measurement of pressure distribution over large areas and varying temperatures, reducing material consumption and labor costs, while providing a reliable and reproducible method for optimizing pressure application in wafer bonding processes.
Implementation Method 1
measure at least one physical parameter of at least one electromagnetic wave or several electromagnetic waves after passing through a measurement layer
Implementation Method 2
measure the pressure dependency of one or more optical property (properties) of the measurement layer between the two pressure bodies
Data Source
AI summary
A measuring device for determining a pressure map during application of pressure to at least one measurement layer between a first pressure body and a second pressure body the measuring device comprising: (i) at least one transmitter located on one peripheral edge of the measurement layer for emission of signals in the form of electromagnetic waves along a first signal route which runs through the measurement layer and at least one other signal route which runs through the measurement layer, and (ii) at least one receiver located on the peripheral edge for reception of the signals of the first signal route and other signal route(s), which signals are sent by the transmitter through the measurement layer and can be changed when pressure is applied. Furthermore this invention relates to a corresponding method.