Electromagnetic Pump Temperature Control via Current and Magnetic Field
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Solution Overview
Problem
Existing methods for controlling the temperature of electromagnetic pumps and tubing in vacuum coating systems for PVD processes face challenges such as heat loss, contamination, and difficulty in maintaining constant evaporation rates due to varying barometric pressures, which affect the flow of liquid metal and lead to cold spots and blockages.
Innovation Solution
The method involves an electromagnetic pump made of electric conductive material, with controlled current and magnetic field strength to manage temperature, and a vacuum enclosure for the pump and feed tube to minimize heat loss, along with a closed container for pressure control and heating of the feed tube to prevent contamination and ensure consistent evaporation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the liquid metal reservoir is placed outside the vacuum chamber, then the vacuum chamber structure is simplified and access is easier, but the feed tube must pass through the chamber wall creating cold spots that may freeze the melt and cause blockages
Solution Approach 1:
A bellow-type connection is introduced as an intermediary component between the vacuum chamber and the external reservoir. This flexible connection allows the feed tube to pass through the chamber wall while accommodating thermal expansion and preventing cold spots that would freeze the liquid metal, thus maintaining reliable flow without compromising the simplified external reservoir placement.
2Ease of operation
If a valve is used to control the flow of liquid metal, then the supply can be regulated, but it is impractical and cannot empty the evaporator device without breaking the vacuum
Solution Approach 1:
The mechanical valve system is replaced with an electromagnetic pump that uses electromagnetic fields to control the flow of liquid metal. This substitution allows for precise flow regulation while maintaining vacuum integrity, as the electromagnetic pump can be controlled to stop flow without requiring mechanical valve operations that would break the vacuum seal.
3Power
If the electromagnetic pump operates at high current to maintain flow control, then the pumping force is sufficient, but the pump temperature increases causing heat loss and potential contamination
Solution Approach 1:
The operating parameters of the electromagnetic pump are dynamically adjusted by controlling both the current and magnetic field strength. By optimizing the combination of these parameters, the pump maintains sufficient pumping force while operating at lower temperatures, reducing heat loss and contamination risks. The system can vary current and magnetic field levels to match the actual flow requirements rather than operating at maximum power continuously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively maintains the temperature of the electromagnetic pump and tubing, reduces heat loss, and ensures a consistent supply of liquid metal, preventing blockages and contamination, thereby enhancing the efficiency and reliability of the PVD coating process.
Implementation Method 1
the supply of the liquid metal is controlled by exerting a force on the liquid metal in the container and by the electromagnetic pump in the feed tube
Implementation Method 2
an electromagnetic pump made of electric conductive material, with controlled current and magnetic field strength to manage temperature
Implementation Method 3
a vacuum enclosure for the pump and feed tube to minimize heat loss
Implementation Method 4
the supply of the liquid metal is controlled by exerting a force on the liquid metal in the container
Data Source
AI summary
A method to control the temperature of an electromagnetic pump in an apparatus wherein a liquid metal is supplied through a feed tube from a container adapted to contain a liquid metal to an evaporator device in a vacuum chamber, wherein the temperature of the electromagnetic pump is controlled by controlling one or more ofthe force exerted on the liquid metal in the container,the current of the electromagnetic pump, and/orthe strength of the magnet field of the electromagnetic pump.