Electromagnetic Sensor Assembly for Non-Interfering Carrier Position Sensing
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Solution Overview
Problem
Conventional magnetic sensors interfere with the ability of substrate transfer systems to levitate and convey carriers, and adversely impact semiconductor fabrication processes.
Innovation Solution
A magnetic sensor assembly with a base, current source, and sensor elements configured to measure magnetic flux density in opposite directions, and a magnetic levitation actuator assembly with electromagnets and sensor elements to detect carrier position without interfering with levitation or fabrication processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional magnetic sensors are used to detect carrier position, then position detection is achieved, but the magnetic fields generated by the sensors interfere with the substrate transfer system's ability to levitate and convey the carrier
Solution Approach 1:
A non-magnetic membrane is introduced as an intermediary component between the magnetic sensor and the carrier. The membrane allows magnetic flux to pass through for position detection while preventing direct magnetic interaction between the sensor and the carrier, thereby eliminating interference with the levitation system
Solution Approach 2:
The patent replaces conventional magnetic sensors with an optical measurement system that uses light to detect carrier position through the membrane. This substitution eliminates the need for magnetic fields in the sensing mechanism, thereby removing the harmful magnetic interference with the levitation system
2Measurement precision
If conventional magnetic sensors are used to detect carrier position, then position detection is achieved, but the magnetic fields adversely impact semiconductor fabrication processes such as process plasma
Solution Approach 1:
The non-magnetic membrane serves as a barrier that allows optical signals to pass through for position detection while blocking magnetic field lines, preventing magnetic interference with the semiconductor fabrication process occurring in the process chamber
Solution Approach 2:
By replacing magnetic sensing with optical sensing, the system eliminates magnetic field generation in the process chamber, thereby preventing adverse impacts on plasma-based semiconductor fabrication processes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and reliable detection of carrier position without disrupting levitation or impacting semiconductor processing, allowing for smooth transportation and fabrication.
Implementation Method 1
an electromagnet including at least one coil configured to generate a magnetic flux
Implementation Method 2
a first sensor element and second sensor element coupled to the base, wherein the first sensor element and second sensor element are configured to measure magnetic flux density
Data Source
AI summary
A magnetic sensor includes a base including a first side and a second side; a current source; at least one coil coupled to the base and coupled to the current source, wherein a magnetic flux is generated when the current source supplies a current to the at least one coil; and a first sensor element and a second sensor element coupled to the base, wherein the first sensor element and second sensor element are configured to measure magnetic flux density, and the generated magnetic flux is configured to pass through the first sensor element in a first direction and pass through the second sensor element in a second direction that is opposite to the first direction.