Electromigration Testing via Segmented Copper Bump Joints

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Solution Overview

Problem

Current methods for electromigration testing in microelectronics, such as daisy chain testing and V-groove testing, are costly, inefficient, and unable to accurately measure real-time temperature and resistance fluctuations at individual interconnects, making it difficult to understand and quantify electromigration effectively, especially in small-scale microelectronics systems.

Innovation Solution

A method and system for testing electromigration using copper pins with 30-50 micron bumps, forming a joint with solder, and applying current to evaluate electromigration, which includes precise alignment and characterization using cameras and a moveable platform to replicate the size and conditions of microelectronics systems, allowing for cost-effective and efficient testing of individual joints.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If daisy chain testing or V-groove testing is used for electromigration testing, then testing can be performed, but the testing cost increases and efficiency decreases

Engineering Contradiction:
Improveelectromigration testing capabilityVSAvoidtesting efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The invention segments the testing approach by using individual separate joints instead of interconnected daisy chains or V-groove structures. Each joint can be tested independently, allowing parallel testing of multiple joints simultaneously, which dramatically improves testing efficiency and reduces costs while maintaining reliable electromigration measurement capability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention uses simplified joint structures that replicate the essential electromigration characteristics of real microelectronics interconnects without requiring complex fabrication processes. The bumps and joints are created using standard spherical bump technology rather than specialized V-groove or daisy chain structures, making the testing more cost-effective and efficient

Inventive Principle:
Principle #26Copying

2Reliability

If daisy chain testing or V-groove testing is used for electromigration testing, then testing can be performed, but the testing cost increases

Engineering Contradiction:
Improveelectromigration testing capabilityVSAvoidtesting cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

By using individual separate joints instead of interconnected structures, each joint can be manufactured and tested independently using standard spherical bump technology. This segmentation eliminates the need for complex daisy chain or V-groove fabrication processes, significantly reducing manufacturing costs while maintaining testing capability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention employs simple, easily manufacturable joint structures with standard spherical bumps that can be produced cost-effectively. These individual joints serve as disposable or reusable test specimens that eliminate the need for expensive specialized fixtures and complex interconnect structures

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Reliability

If conventional testing methods are used, then testing can be performed, but real-time temperature and resistance fluctuations at individual interconnects cannot be measured

Engineering Contradiction:
Improveelectromigration measurement accuracyVSAvoidreal-time measurement capability
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

By using individual separate joints instead of interconnected structures, each joint can be independently monitored with measurement equipment. This segmentation enables real-time measurement of temperature and resistance fluctuations at each specific joint, providing the measurement precision needed to accurately characterize electromigration while maintaining reliable testing capability

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate, efficient, and cost-effective electromigration testing of small-scale interconnects, providing real-time data on temperature and resistance, reducing setup time, and enabling parallel testing, thus improving understanding and reliability of microelectronics systems.

Implementation Method 1

a moveable platform for receiving the second cartridge and moving the first bump and the second bump into contact with one another

Methodology Applied
Scientific EffectMechanical actuation: Mechanical Force

Implementation Method 2

a plurality of cameras for viewing alignment of the first bump and the second bump via operation of the moveable platform

Methodology Applied
Scientific EffectOptical imaging: Photography

Implementation Method 3

forming a joint between the first bump and the second bump with solder

Methodology Applied
Scientific EffectSoldering: Soldering

Implementation Method 4

applying current to the joint to evaluate electromigration in the joint

Methodology Applied
Scientific EffectElectromigration: Diffusion

Data Source

PatentUS10043720B2Systems and methods for interconnect simulation and characterization
Publication Date: 2018.08.07 THE ARIZONA BOARD OF REGENTS ON BEHALF OF THE UNIV OF ARIZONA
  • US10043720B2 patent drawing
  • US10043720B2 patent drawing
  • US10043720B2 patent drawing

AI summary

Exemplary systems and methods allow for precise formation and subsequent characterization of electrical interconnects, for example solder joints associated with integrated circuit packages. The system may utilize a cartridge-like structure for use in aligning the metal components to be interconnected, and to facilitate subsequent testing of the interconnect.