Electron Beam Alignment in X-Ray Sources

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Solution Overview

Problem

Electron-optical systems, particularly electron-impact X-ray sources, face challenges in maintaining optimal alignment and calibration due to the need for frequent realignment after component replacement, physical movement, or exposure to external shocks, which is time-consuming and costly.

Innovation Solution

An electron-optical system with aligning and deflection means, including electrostatic and magnetic components, and a controller that uses a sensor area and data carrier to perform a sequence of steps for precise alignment and focusing of the electron beam, allowing for automatic calibration and minimal interference with the X-ray source's operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual alignment procedures are performed after component replacement or system movement, then alignment accuracy can be restored, but time loss and operational downtime increase significantly

Engineering Contradiction:
Improvealignment accuracyVSAvoidrealignment time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The system performs preliminary alignment by storing reference alignment data during system assembly or calibration. When misalignment occurs due to component replacement or movement, the controller automatically retrieves and applies the stored reference alignment parameters, eliminating the need for time-consuming manual realignment procedures while maintaining alignment accuracy.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system incorporates sensors that continuously monitor the actual alignment state of the electron beam and optical components. This feedback is processed by the controller, which compares real-time measurements against reference alignment data and automatically adjusts alignment parameters to correct deviations, enabling rapid restoration of alignment accuracy without manual intervention.

Inventive Principle:
Principle #23Feedback

2Measurement precision

If frequent manual realignment is performed to maintain beam alignment, then alignment accuracy is maintained, but operational productivity decreases due to repeated interruptions

Engineering Contradiction:
Improvebeam alignment accuracyVSAvoidoperational productivity
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The alignment system operates autonomously by continuously monitoring beam position and component alignment through integrated sensors. The controller automatically adjusts alignment parameters in real-time based on sensor feedback, enabling the system to self-correct alignment deviations without requiring operator intervention, thereby maintaining alignment accuracy while eliminating productivity losses from manual realignment interruptions.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system maintains continuous beam alignment through real-time monitoring and automatic adjustment mechanisms. Sensors continuously track beam position and alignment parameters, and the controller continuously adjusts alignment components to maintain optimal alignment, ensuring uninterrupted operation and eliminating the stop-start nature of manual realignment procedures.

Inventive Principle:
Principle #20Continuity of useful action

3Measurement precision

If complex manual alignment procedures are used to achieve precise beam focusing, then focusing precision is improved, but ease of operation deteriorates due to procedural complexity

Engineering Contradiction:
Improvebeam focusing precisionVSAvoidalignment operation simplicity
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The system replaces complex manual mechanical alignment procedures with an automated electronic control system. Sensors electronically detect beam position and focusing parameters, and the controller automatically adjusts focusing components based on this data, eliminating the need for operators to perform complex manual alignment operations while achieving superior focusing precision through precise electronic control.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system automatically optimizes focusing parameters by continuously monitoring beam characteristics and adjusting focusing component parameters (such as lens currents or positions) based on real-time measurements. This automatic parameter optimization achieves precise beam focusing without requiring operators to understand or manually adjust complex focusing parameters.

Inventive Principle:
Principle #35Parameter changes

4Ease of operation

If automated alignment systems are implemented, then ease of operation and productivity are improved, but device complexity increases due to additional sensors and controllers

Engineering Contradiction:
Improvealignment operation simplicityVSAvoidsystem component count
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The automated alignment system uses multi-functional sensors and controllers that serve both alignment monitoring and beam position detection functions. The same sensor array used for alignment also provides feedback on beam position and intensity, and the controller manages both alignment adjustments and operational parameters, reducing the need for separate dedicated components and minimizing the increase in device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system merges the alignment monitoring and control functions with the existing beam detection and control infrastructure. Alignment sensors are integrated with beam position sensors, and the alignment controller is combined with the beam control system, consolidating multiple functions into unified components and minimizing the addition of separate complex subsystems.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables convenient, accurate, and economical operation of electron-optical systems by automatically compensating for misalignments and adjusting focusing settings, reducing the need for manual realignment and minimizing downtime.

Implementation Method 1

The aligning means may be of an electro-optical or mechanical type... Each of the aligning means and deflector may be embodied as a device operable to provide an electrostatic and/or magnetic field for accelerating the electrons sideways

Methodology Applied
Scientific EffectElectrostatic deflection: Electrostatic Induction

Implementation Method 2

Each of the aligning means and deflector may be embodied as a device operable to provide an electrostatic and/or magnetic field for accelerating the electrons sideways, such as a plate, pair of plates, spatial arrangement of plates or any other geometrical electrode configuration suitable for electrostatic deflection, a (circular or non-circular) coil or coil system

Methodology Applied
Scientific EffectMagnetic deflection: Lorentz Force

Implementation Method 3

The focusing means may be a coil or coil system, such as an electromagnetic lens or a electrostatic focusing lens or a combination of both. The focusing power of the focusing means is variable, e.g., by adjusting the intensity of a focusing magnetic/electric field

Methodology Applied
Scientific EffectElectromagnetic lens focusing: Electromagnetic Induction

Implementation Method 4

The focusing means may be a coil or coil system, such as an electromagnetic lens or a electrostatic focusing lens or a combination of both

Methodology Applied
Scientific EffectElectrostatic lens focusing: Electrostatic Induction

Implementation Method 5

Each of the aligning means and deflector may be embodied as a device operable to provide an electrostatic and/or magnetic field for accelerating the electrons sideways, such as a plate, pair of plates, spatial arrangement of plates or any other geometrical electrode configuration suitable for electrostatic deflection

Methodology Applied
Scientific EffectElectrostatic deflection: Electrostatic Induction

Implementation Method 6

Each of the aligning means and deflector may be embodied as a device operable to provide an electrostatic and/or magnetic field for accelerating the electrons sideways, such as a plate, pair of plates, spatial arrangement of plates or any other geometrical electrode configuration suitable for electrostatic deflection, a (circular or non-circular) coil or coil system

Methodology Applied
Scientific EffectMagnetic deflection: Lorentz Force

Implementation Method 7

a sensor area and a controller. The controller is configured to perform a sequence of steps... determining, for one focusing-means setting, a relative position of the outgoing electron beam

Methodology Applied
Scientific EffectElectron impact detection: Electron Beam

Data Source

PatentEP3089192B1Focusing an electron beam in an x-ray source
Publication Date: 2018.05.09 EXCILLUM
  • EP3089192B1 patent drawingFigure 1a
  • EP3089192B1 patent drawingFigure 1b
  • EP3089192B1 patent drawingFigure 1c

AI summary

The invention provides a technique for indirectly measuring the degree of alignment of a beam in an electron-optical system comprising aligning means, focusing means and deflection means. To carry out the measurements, a simple sensor may be used, even a single-element sensor, provided it has a well-defined spatial extent. When practised in connection with an X-ray source which is operable to produce an X-ray target, the invention further proposes a technique for determining and controlling a width of an electronbeam at its intersection point with the target.