Electron Beam Detector Shield Scatterer Geometry
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Solution Overview
Problem
Conventional electron beam detectors suffer from varying detection sensitivity depending on the irradiation position of the electron beam, leading to inaccurate measurement of electron beam characteristics.
Innovation Solution
An electron beam detector design featuring a shield plate with multiple openings, a scatterer positioned at a predetermined distance from the shield plate to scatter the electron beam, and a beam detection element at an equal distance from the scatterer, ensuring consistent detection sensitivity across different irradiation positions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional electron beam detector is used, then the detection structure is simple, but the detection sensitivity varies largely depending on the irradiation position of the electron beam
Solution Approach 1:
The shield plate is divided into multiple openings (first opening, second opening, third opening) arranged at different positions. Each opening allows detection of electron beams from different irradiation positions, enabling position-independent sensitivity measurement through segmented detection paths
Solution Approach 2:
A scatterer is introduced as an intermediary component between the shield plate and the detection element. The scatterer scatters electron beams passing through the openings, creating consistent detection conditions regardless of the original irradiation position, thereby mediating the variation in detection sensitivity
2Measurement precision
If the scatterer is disposed at a predetermined distance from the shield plate and the beam detection element is disposed at an equal distance from the scatterer, then the detection sensitivity variation is suppressed, but the device complexity increases
Solution Approach 1:
The detection system is designed with equipotential geometry where the beam detection element is positioned at equal distance from multiple openings in the shield plate. This symmetric arrangement ensures that electron beams from different irradiation positions undergo equivalent scattering paths, creating uniform detection conditions across all measurement positions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for accurate measurement of electron beam displacement and deformation, enhancing the precision of electron beam processing tasks such as exposure and observation by minimizing sensitivity variations.
Implementation Method 1
a scatterer disposed at a predetermined distance from the shield plate and configured to scatter an electron beam passed through any of the openings of the shield plate
Implementation Method 2
a beam detection element disposed at a predetermined distance from the scatterer and configured to convert the electron beam passed through the scatterer into an electric signal
Data Source
AI summary
There is provided an electron beam detector including an electron beam scatterer which is disposed at a predetermined distance below a shield including a plurality of openings formed therein, and a beam detection element disposed at a predetermined distance below the scatterer and configured to convert an electron beam into an electric signal. In the electron beam detector, the scatterer is disposed at an equal distance from any of the openings in the shield, and the beam detection element is disposed at an equal distance from any of the openings in the shield. Thus, the electron beam detector can suppress a variation in detection sensitivity depending on the position of the opening.