Electron Beam Diffracting Nanomaterial for Multi-Beam Processing
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Solution Overview
Problem
Conventional electronic beam machining systems have low efficiency due to the use of a single electron gun, leading to complex and costly systems when multiple guns are employed.
Innovation Solution
An electronic beam machining system that utilizes a diffraction unit with a two-dimensional nanomaterial to generate multiple diffraction electron beams, allowing for high-efficiency processing by emitting a plurality of electron beams that can be focused and controlled to etch or treat objects effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single electron gun is used in the electronic beam machining system, then the system structure remains simple and cost-effective, but the processing efficiency is limited due to the ability to emit only a single electron beam
Solution Approach 1:
The single electron beam is segmented into multiple diffraction electron beams by passing it through a two-dimensional nanomaterial, creating multiple processing zones simultaneously while maintaining a single electron gun structure
Solution Approach 2:
A two-dimensional nanomaterial is introduced as an intermediary component between the electron gun and the workpiece to diffract the electron beam into multiple beams, enabling multi-point processing without adding multiple electron guns
2Productivity
If multiple electron guns are used to increase processing efficiency, then the productivity improves, but the system becomes complicated and costly
Solution Approach 1:
Instead of using multiple electron guns, the system creates multiple copies of the electron beam path by diffracting a single beam into multiple beams that can be independently controlled and focused on different areas of the workpiece
Solution Approach 2:
The single electron gun is made multi-functional by using the two-dimensional nanomaterial to generate multiple diffraction beams, allowing one component to perform the function of multiple electron guns
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves high efficiency in processing by using multiple diffraction electron beams, enabling complex patterns and treatments like welding, drilling, and etching with improved cost-effectiveness compared to single-gun systems.
Implementation Method 1
allowing the incident electron beam to pass through a two-dimensional nanomaterial to form a transmission electron beam and a plurality of diffraction electron beams
Implementation Method 2
The electron beam generates the heat at high temperature so that the workpiece is melted or sublimated
Implementation Method 3
The electron beam generates the heat at high temperature so that the workpiece is melted or sublimated
Data Source
AI summary
The disclosure relates to a photolithography method based on electronic beam. The method includes: providing an electronic beam; making the electron beam transmit a two dimensional nanomaterial to form a transmission electron beam and a number of diffraction electron beams; shielding the transmission electron beam; and radiating a surface of an object by the plurality of diffraction electron beams. The photolithography method is high efficiency and has low cost.