Electron Beam Imaging Discharge via Light-Induced Emission
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Solution Overview
Problem
Electron beam inspection tools face image distortion due to charging effects when scanning areas, which can also affect electrically coupled regions, necessitating a method to discharge scanned areas effectively.
Innovation Solution
A system incorporating electron optics and light optics to scan areas with an electron beam and illuminate targets, such as electrodes and objects, to induce electron emission and compensate for charging, with a controller determining illumination based on potential differences to manage electron flow between electrodes and the object.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an electron beam scans an area to generate an image, then image detection is achieved, but charging of the area occurs causing image distortion
Solution Approach 1:
The patent converts the harmful charging effect into a beneficial discharge mechanism by using light-induced electron emission. When the scanned area becomes positively charged, light irradiation stimulates additional electron emission from the area or nearby electrodes, which are attracted to and neutralize the positive charge, thereby converting the harmful charging effect into a useful discharge process that restores electrical neutrality and eliminates image distortion
Solution Approach 2:
The patent introduces light as an intermediary element to facilitate the discharge process. Light irradiation serves as the mediator that triggers electron emission from the scanned area or nearby electrodes, enabling indirect electron supply to neutralize positive charging without direct electrical contact, thus resolving the contradiction between maintaining image detection accuracy and eliminating charging-induced distortion
2Productivity
If electron beam scanning is performed continuously, then imaging productivity is improved, but charging effects accumulate causing increased image distortion
Solution Approach 1:
The patent implements periodic discharge action by introducing light irradiation at specific intervals during the electron beam scanning process. When positive charging is detected or anticipated, light is irradiated to trigger electron emission and discharge the accumulated positive charge. This periodic intervention allows continuous high-speed scanning to proceed while regularly eliminating charging effects that would otherwise accumulate and cause increasing image distortion
Solution Approach 2:
The patent employs feedback control where the charging state of the scanned area is monitored (through image signal analysis or separate sensing), and light irradiation is applied in response to detected positive charging conditions. This feedback mechanism ensures that discharge actions are taken precisely when needed to maintain image quality, allowing continuous scanning at high productivity without allowing charging effects to accumulate to distortion-causing levels
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively compensates for charging-induced image distortion by controlled electron emission, maintaining image accuracy and reducing electrical coupling effects during scanning.
Implementation Method 1
light optics that may be configured to illuminate at least one target of (a) the first electrode and (b) the object, thereby causing an emission of electrons between the first electrode and the object
Data Source
AI summary
A method and a system for imaging an object, the system may include electron optics that may be configured to scan a first area of the object with at least one electron beam; wherein the electron optics may include a first electrode; and light optics that may be configured to illuminate at least one target of (a) the first electrode and (b) the object, thereby causing an emission of electrons between the first electrode and the object.