Electron Beam Deflection via Inclined Electrode
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Solution Overview
Problem
Existing electron beam devices are limited by small deflection angles and require complex structures for beam profile formation, maintenance, and intensity control.
Innovation Solution
The device incorporates a deflection electrode with an inclined surface for large-angle deflection, an additional accelerating electrode, and AC voltage-controlled electrodes to achieve high-speed beam manipulation and profile shaping, along with heating means to manage particulate vapors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If electrostatic deflection with two opposing electrodes is used, then the device structure is simple, but the maximum deflection angle is limited to about 7°
Solution Approach 1:
Instead of using conventional electrostatic deflection electrodes that produce small deflection angles, the patent inverts the approach by using a deflecting electrode with an inclined surface that reflects the electron beam. This reflection mechanism enables very large deflection angles (0° to 180°) while maintaining structural simplicity, directly resolving the contradiction between simple structure and large deflection capability.
2Ease of operation
If conventional electrostatic deflection is used, then the device is easy to operate, but beam profile formation requires complex means
Solution Approach 1:
The deflecting electrode with inclined surface serves multiple functions: it provides large-angle deflection and simultaneously enables beam profile formation through its inclined geometry. Additionally, AC voltage application allows dynamic beam profile shaping. This multi-functionality eliminates the need for separate complex beam profile formation means while maintaining ease of operation.
3Adaptability or versatility
If AC voltage is applied to two opposing electrodes for beam deflection, then beam profile can be shaped, but maintenance requirements increase due to particulate vapor deposition
Solution Approach 1:
The patent converts the harmful effect of particulate vapor deposition on the deflecting electrode into a beneficial heating effect. By applying AC voltage, the deposited particles are heated and evaporated, automatically cleaning the electrode surface. This self-cleaning mechanism reduces maintenance requirements while preserving beam profile control capability.
4Productivity
If high frequency AC voltage is applied for high speed beam manipulation, then productivity increases, but energy consumption increases
Solution Approach 1:
The patent uses periodic AC voltage application to achieve high-speed beam manipulation for surface treatment. The periodic nature of AC voltage enables the beam to oscillate rapidly across the workpiece surface, increasing productivity. The system optimizes the balance between productivity gain and energy consumption by selecting appropriate frequencies and voltages.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables larger deflection angles, simplified beam profile formation, reduced maintenance, and the ability to produce longer or more intense electron beams with controlled intensity distribution on workpieces.
Implementation Method 1
Two electrodes disposed in opposition in the transverse direction of the beam generally serve as a deflection means, which can effect an electrostatic deflection of the electron beam
Implementation Method 2
The deflection means comprise two mutually opposing electrodes, between which an AC voltage is applied which can deflect the electron beam so that the beam profile of the electron beam can be specifically designed
Implementation Method 3
The at least one deflection electrode, in particular the output-side deflection electrode is heated with the heating device so that the particles from the workpiece deposited on the deflection electrode are quickly evaporated again or removed from the deflection electrode
Data Source
AI summary
The invention relates to a device (20) for producing an electron beam (4), which comprises a hot cathode (1), a cathode electrode (2), an anode electrode (3) having an opening (6) through which an electron beam (4) produced by the device can pass, wherein during the operation of the device (20) a voltage for accelerating the electrons exiting from the hot cathode (1) is applied between the cathode electrode (2) and the anode electrode (3), and further comprising deflection means that can deflect the electron beam (4) that has passed through the opening of the anode electrode (3), wherein the deflection means comprise at least one deflection electrode (8, 12), which can reflect the electron beam (4) and/or which comprises a deflection surface (9) that is inclined towards the propagation direction of the electron beam (4).