Electron Beam Detection Data via Photocathode Light Feedback

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Solution Overview

Problem

The adjustment of detection sensitivity in electron beam applicators is typically manual and requires a large dynamic range, which can be challenging when capturing entire images or performing adjustments like enlarging partial images.

Innovation Solution

A method that adjusts the quantity of light reaching the photocathode to set the signal intensity of the detection signal to a preset value, allowing for the creation of detection data and image composition even with a small dynamic range of detector sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual adjustment of detection sensitivity is performed, then detection results can be obtained, but a large dynamic range of detector sensitivity is required which increases device complexity

Engineering Contradiction:
Improvedetection sensitivityVSAvoiddetector dynamic range
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent changes the parameter being adjusted from detector sensitivity to light source intensity. By varying the quantity of light emitted by the light source, the system achieves different detection sensitivities without requiring the detector to have a large dynamic range. This resolves the contradiction by moving the adjustment point to a different component (light source rather than detector).

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The system uses feedback control where the detection result is used to automatically adjust the light source intensity. The control unit monitors the detection signal and adjusts the light quantity to maintain optimal detection conditions, eliminating the need for manual adjustment and reducing the required detector dynamic range.

Inventive Principle:
Principle #23Feedback

2Measurement precision

If detection sensitivity is adjusted manually, then image capture can be performed, but the process requires operator intervention which reduces productivity

Engineering Contradiction:
Improvedetection sensitivityVSAvoidimage capture efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The system performs self-adjustment of detection sensitivity through automatic feedback control. The control unit automatically adjusts the light source intensity based on detection results without requiring operator intervention, enabling the system to serve itself and maintain optimal detection conditions continuously.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

Automatic feedback control loops continuously monitor detection signals and adjust light source intensity accordingly, eliminating manual intervention and improving productivity while maintaining measurement precision.

Inventive Principle:
Principle #23Feedback

3Area of stationary object

If high detection sensitivity is used to capture entire images, then complete coverage is achieved, but signal intensity varies across regions making image composition difficult

Engineering Contradiction:
Improveirradiation region coverageVSAvoidimage composition accuracy
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The system dynamically adjusts the light source intensity during the imaging process. By varying the light quantity in response to detection results, the system compensates for signal intensity variations across different regions of the irradiation target, enabling accurate image composition while maintaining complete coverage.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the acquisition of detection data on the irradiation region with a small dynamic range of detector sensitivity, reducing costs and preventing irradiation target damage, while maintaining accurate image composition.

Implementation Method 1

a photocathode configured to generate releasable electrons in response to receiving light from the light source

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 2

an anode configured to form an electric field between the photocathode and the anode and extract the releasable electrons by the formed electric field to form an electron beam

Methodology Applied
Scientific EffectElectric field: Electric Field

Data Source

PatentUS20250132117A1Method for creating detection data in electron beam application device, method for synthesizing image of object being irradiated, program, recording medium, and electron beam application device
Publication Date: 2025.04.24 PHOTO ELECTRON SOUL INC
  • US20250132117A1 patent drawing
  • US20250132117A1 patent drawing
  • US20250132117A1 patent drawing

AI summary

An object is to provide a creation method of detection data based on a novel principle. The creation method includes: an electron beam irradiation step of irradiating an irradiation region with an electron beam; a detection step of detecting an emission quantity data from the irradiation region and generating a detection signal; a quantity of light adjustment step of adjusting a quantity of light reaching a photocathode from a light source so that a signal intensity of the detection signal is a preset value; a step of repeating the electron beam irradiation step, the detection step, and the quantity of light adjustment step until the signal intensity of the detection signal becomes the preset value; and a detection data output step of outputting the quantity of light adjustment data where the signal intensity of the detection signal is the preset value as detection data on the irradiation region.