Electron Beam Splitting Layout for Redundant Light Output
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Solution Overview
Problem
Existing light source systems lack redundancy and fail to maintain efficient light output in case of accelerator module failures or shutdowns, leading to disruptions in applications like semiconductor processing.
Innovation Solution
A light source system that includes multiple accelerator modules, splitters, recombiners, and radiator modules, capable of operating in both normal and backup modes. The system splits electron beams into multiple paths, ensuring equal path length differences and allowing for redundancy in light output generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple accelerator modules are used to provide redundancy, then reliability is improved, but device complexity increases
Solution Approach 1:
The system is divided into multiple independent accelerator modules, each capable of operating autonomously to provide light output. This segmentation allows redundancy where if one module fails, others can continue operation, improving reliability while keeping each module's complexity manageable
Solution Approach 2:
Multiple accelerator modules are combined with shared beam transport and radiator systems. The modules share common infrastructure (beam lines, magnets, radiators) reducing overall system complexity while maintaining redundancy through parallel operation capabilities
2Productivity
If electron beams are split into multiple paths with equal path length differences, then productivity is improved through continuous operation, but device complexity increases due to additional beam control elements
Solution Approach 1:
The beam splitting and path length equalization are configured in advance during system design. The beam transport paths are pre-configured with equal path length differences, eliminating the need for complex real-time adjustments and enabling continuous operation without interruption
Solution Approach 2:
The system uses dynamic beam switching capabilities that allow rapid transition between different accelerator modules and beam paths. This dynamic operation maintains continuous light output by seamlessly switching between modules, improving productivity while managing complexity through automated control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides continuous and redundant light output, ensuring high photon energy and coherence even in case of failures or shutdowns of individual accelerator modules, thereby maintaining operational reliability for applications like EUV lithography.
Implementation Method 1
a first kicker configured to: receive an input electron beam comprising a plurality of electron bunches; and deflect electron bunches of the electron beam substantially within a first plane, thereby spatially separating the input electron beam into a first plurality of electron beams
Implementation Method 2
a second kicker configured to: receive the first plurality of electron beams; and deflect electron bunches of the first plurality of electron beams substantially within a second plane, thereby spatially separating the first plurality of electron beams into a second plurality of electron beams
Implementation Method 3
a first septum configured to: receive a first subset of the second plurality of electron beams; and deflect electron beams of the first subset substantially within the first plane
Implementation Method 4
Each of the plurality of radiator modules is configured to receive electron bunches from a single accelerator module and generate a light output
Data Source
AI summary
A light source system, preferably including one or more electron inputs, splitters, recombiners, and/or electron outputs, and optionally including one or more accelerator modules, input transports, radiator modules, and/or output transports. The system can optionally include one or more ancillary elements (e.g., electron optics elements). A method of operation, preferably including operating in a normal mode and/or operating in a backup mode.