Temperature Control for Electron Beam Sample Chuck
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Solution Overview
Problem
The significant temperature difference between the chuck and the sample in scanning electron microscopes can cause sample deformation, leading to intolerable position errors due to heating during mechanical stage movement, which affects the nanometric scale resolution and accuracy of feature scanning.
Innovation Solution
A method and system that monitor and control the temperature of the chuck and sample by setting the target temperature of samples at the load port before moving them to the chuck, using controlled temperature gas flow and temperature sensors to ensure the sample and chuck are at equal temperatures, reducing temperature differences below a threshold (e.g., 0.5 degrees Celsius) to minimize deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the mechanical stage moves the sample to position it within the field of view, then the positioning accuracy is improved, but the chuck temperature increases due to heating from engines and components, causing sample deformation
Solution Approach 1:
The system performs preliminary temperature compensation by calculating the expected temperature increase of the chuck based on mechanical stage movement parameters, and adjusts the sample stage temperature in advance to compensate for the upcoming heating, thereby preventing sample deformation before it occurs
Solution Approach 2:
The system continuously monitors the actual temperature of the chuck and sample stage, compares it with the target temperature, and dynamically adjusts the temperature control parameters to maintain temperature equality between the chuck and sample, eliminating deformation caused by temperature differences
2Productivity
If the sample is positioned on the heated chuck, then the sample can be scanned by the electron beam, but the temperature difference between the chuck and sample causes sample deformation and position errors
Solution Approach 1:
The system dynamically changes the temperature parameter of the sample stage to match the chuck temperature, using real-time temperature monitoring and control to adjust the sample stage heating or cooling parameters, ensuring temperature equality and preventing sample deformation during scanning
Solution Approach 2:
The system introduces a temperature control system as an intermediary between the chuck and sample stage, which acts as a mediator to balance the temperature difference by adjusting the sample stage temperature to match the chuck temperature, thereby preventing direct thermal deformation of the sample
3Measurement precision
If the electron beam scans nanometric scale features, then high-resolution evaluation is achieved, but the nanometric position errors from sample deformation make the resolution unacceptable
Solution Approach 1:
The system uses real-time temperature feedback from sensors monitoring the chuck and sample stage to continuously adjust temperature control parameters, ensuring that temperature differences remain below thresholds that would cause nanometric deformation, thereby maintaining both resolution and position accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces temperature-induced sample deformation, maintaining accurate positioning and resolution during scanning by ensuring the sample and chuck are at equal temperatures, thereby improving the precision and reliability of nanometric scale feature evaluation.
Implementation Method 1
temperature sensors to ensure the sample and chuck are at equal temperatures
Implementation Method 2
using controlled temperature gas flow and temperature sensors to ensure the sample and chuck are at equal temperatures
Data Source
AI summary
A method, a non-transitory computer readable medium and a system for reducing a temperature difference between a sample and a chuck of an electron beam tool. The method may include determining a target temperature of samples located at the load port of the electron beam tool; setting a temperature of the samples, located at the load port, to the target temperature; moving the sample from the load port to the chuck, the chuck is located within a vacuum chamber, the sample belongs to the samples; and positioning the sample on the chuck, wherein when positioned on the chuck, a temperature of the sample substantially equals a temperature of the chuck.