Electron Beam Spot Size Measurement Without Rotation
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Solution Overview
Problem
Existing X-ray source technologies face challenges in accurately determining and controlling the focal spot size of electron beams impinging on targets, particularly for line-shaped spots on moving targets, which can lead to overheating and reduced reliability due to the need for rotation-based measurements.
Innovation Solution
A method that measures the width of the electron beam in multiple directions without rotating the electron spot, using deflection and detection of electrons to determine the beam width and power density distribution, allowing for precise control of the electron beam orientation and power application to maintain high performance without overheating the target.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If rotation-based measurement is used to determine electron beam spot size, then measurement capability is improved, but device complexity increases and reliability decreases
Solution Approach 1:
The patent extracts the measurement function from the electron beam path by using a separate sensor to detect X-ray radiation. Instead of modifying the electron beam itself for measurement, the system measures the X-ray output which correlates to spot size, thereby separating the measurement function from the beam control system and reducing device complexity.
Solution Approach 2:
The patent introduces X-ray radiation as an intermediary between the electron beam and the measurement sensor. Rather than directly measuring electron beam parameters, the system measures the X-ray radiation produced by electron-target interaction, which serves as a reliable indicator of spot size without requiring complex electron-optical modifications.
2Measurement precision
If electron beam is rotated for measurement, then spot size can be determined in all directions, but the original beam orientation is distorted
Solution Approach 1:
The patent performs measurements in the original beam orientation without rotation by using X-ray radiation detection. The measurement system is configured to capture spot size information in the inherent beam coordinate system, eliminating the need for preliminary rotation actions that would distort the spot shape.
3Measurement precision
If line-shaped spot is rotated to align with target motion, then measurement is possible, but target overheating occurs
Solution Approach 1:
The patent replaces the mechanical rotation of the electron beam with a stationary measurement approach using X-ray radiation detection. The measurement system remains fixed while capturing spot size data, eliminating the mechanical rotation that would cause target overheating in line-shaped spot configurations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate measurement and control of electron beam dimensions and power distribution, optimizing X-ray generation by maintaining the original orientation and total power of the electron beam, thus enhancing the brightness and reliability of the X-ray source while preventing target damage.
Implementation Method 1
X-ray radiation may be generated by allowing an electron beam to impact an electron target
Implementation Method 2
The width of the electron beam in the interaction region, where it impinges on the electron target, is not straightforward to determine
Data Source
AI summary
A method in an X-ray source configured to emit, from an interaction region, X-ray radiation generated by an interaction between an electron beam and a target, the method including the steps of: providing the target; providing the electron beam; deflecting the electron beam along a first direction relative the target; detecting electrons indicative of the interaction between the electron beam and the target; determining a first extension of the electron beam on the target, along the first direction, based on the detected electrons and the deflection of the electron beam; detecting X-ray radiation generated by the interaction between the electron beam and the target; and determining a second extension of the electron beam on the target, along a second direction, based on the detected X-ray radiation.