Electron Beam Spot Reconstruction Using Multi-Angle Edge Widths
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Solution Overview
Problem
There is a growing need for an accurate method to reconstruct the shape of an electron beam spot, which is impacted by various parameters of the electron beam system, and existing methods lack precision in achieving this.
Innovation Solution
An electron beam spot shape reconstruction unit, comprising a processing circuit and memory unit, processes multiple groups of images of circular targets at different polar angles to determine first-axis and second-axis edge width information, enabling accurate reconstruction of the electron beam spot shape.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional methods are used to reconstruct electron beam spot shape, then the process is simpler, but the measurement precision is insufficient
Solution Approach 1:
The patent divides the spot shape reconstruction into multiple discrete steps: acquiring images at different polar angles, processing images to determine edge width information along first and second axes, and reconstructing the spot shape from these segmented measurements. This segmentation enables precise reconstruction while maintaining a systematic and manageable process complexity.
Solution Approach 2:
The patent introduces polar angle as an additional dimension for image acquisition. By capturing images at multiple polar angles and processing them to extract edge width information in different directional axes, the method transforms a two-dimensional spot shape measurement into a multi-dimensional analysis, significantly improving reconstruction accuracy.
2Measurement precision
If multiple groups of images at different polar angles are processed, then the spot shape reconstruction accuracy is improved, but the processing time and complexity increase
Solution Approach 1:
The patent extracts only the essential edge width information from the multiple images taken at different polar angles. By focusing specifically on determining first-axis and second-axis edge width information rather than processing all image data comprehensively, the method achieves accurate spot shape reconstruction while minimizing processing time and computational resources.
3Measurement precision
If edge width information from multiple axes is determined, then the reconstruction accuracy is improved, but the measurement complexity increases
Solution Approach 1:
The processing circuit is designed to perform multiple functions: acquiring images at different polar angles, processing these images to determine edge width information along first and second axes, and reconstructing the spot shape. This multi-functional approach consolidates what could be separate complex operations into a unified processing system, achieving high measurement precision without proportionally increasing overall system complexity.
Data Source
AI summary
An electron beam spot shape reconstruction unit that includes a processing circuit and a memory unit. The processing circuit is configured to reconstruct a shape of an electron beam spot by (i) obtaining multiple groups of images of circular targets of a sample, wherein different groups of images of the multiple groups of images are associated with different polar angles; (ii) processing at least two of the multiple groups of images to determine first-axis edge width information and second-axis edge width information; and (iii) reconstructing the electron beam spot shape based on the first-axis edge width information and second-axis edge width information.