Dual-Stage Electron Beam Steering for Stable X-Ray Target Spots

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Solution Overview

Problem

Laboratory x-ray sources face challenges such as target burn-in, which leads to a needle-like hole drilled by the electron beam, causing variations in the x-ray spectrum and affecting tomographic reconstruction quality. Additionally, there are issues with maintaining the stability of the x-ray spot position, leading to center-shifts and axial spot movements, which impact the geometric magnification and resolution of x-ray projection microscopes.

Innovation Solution

The solution involves active control of the spot position using dual-stage steering to maintain the electron beam through the center of the magnetic lens, thereby stabilizing the x-ray spot on the target. This method also allows for the selection of a new x-ray emission spot after burn-in occurs, ensuring consistent x-ray production.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a fixed electron beam is used to generate x-rays, then the x-ray source is simple to operate, but target burn-in occurs leading to needle-like holes and spectrum variations

Engineering Contradiction:
Improvesimplicity of x-ray source operationVSAvoidtarget durability and spectrum stability
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent applies dynamic beam steering using electromagnetic fields to continuously move the electron beam across the target surface. This dynamic approach prevents static burn-in by distributing electron impact across multiple locations, thereby extending target life and maintaining spectral stability while keeping the system relatively simple to operate.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system performs preliminary beam positioning and scanning operations to identify and avoid previously irradiated areas on the target. By pre-mapping the target surface and tracking irradiation history, the system proactively prevents burn-in before needle-like holes form, maintaining target integrity and consistent x-ray spectrum.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If the electron beam is steered to move the x-ray spot, then target burn-in is prevented, but spot position stability deteriorates causing center-shifts and axial movements

Engineering Contradiction:
Improvetarget life and spectrum consistencyVSAvoidx-ray spot position stability
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent implements feedback control by monitoring the actual electron beam position on the target and adjusting steering parameters in real-time. This closed-loop system compensates for drift and positional variations, maintaining spot stability at the desired location while still enabling beam movement to prevent burn-in through controlled scanning patterns.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system uses dynamic beam steering with controlled motion patterns that balance two competing requirements: moving the beam enough to prevent burn-in while maintaining positional stability for high-resolution imaging. The beam follows predetermined scan patterns that revisit the same location only after sufficient time has passed to prevent damage accumulation.

Inventive Principle:
Principle #15Dynamics

3Manufacturing precision

If a small x-ray source spot is used for high resolution, then image quality improves, but the target is more susceptible to burn-in

Engineering Contradiction:
Improvex-ray microscopy resolutionVSAvoidtarget durability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent segments the target usage by dividing the electron beam's path into multiple discrete locations. Instead of concentrating all beam current on a single small spot, the system rapidly switches between multiple adjacent locations, effectively distributing the thermal load. This allows maintaining a small effective spot size for high resolution while preventing any single point from overheating or forming burn-in holes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system employs periodic scanning patterns where the electron beam repeatedly cycles through a set of predetermined locations on the target. This periodic motion ensures that no single location receives continuous bombardment, allowing heat dissipation between cycles and preventing burn-in while maintaining a consistently small effective spot size for high-resolution imaging.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively mitigates spot shift and drift, stabilizes the x-ray spot position, and extends the life of x-ray targets by preventing burn-in, thereby improving the resolution and quality of x-ray microscopy images.

Implementation Method 1

The resulting x-rays include characteristic line(s) determined by the target's elemental composition and broad bremsstrahlung radiation

Methodology Applied
Scientific EffectBremsstrahlung radiation:

Implementation Method 2

The resulting x-rays include characteristic line(s) determined by the target's elemental composition

Methodology Applied
Scientific EffectCharacteristic x-ray emission:

Implementation Method 3

magnetic lenses often use coils of copper wire inside iron pole pieces. A current through the coils creates a magnetic field in the bore of the pole pieces

Methodology Applied
Scientific EffectElectromagnetic focusing: Electromagnet

Implementation Method 4

steering the electron beam to a desired location on the target using a first and a second steering system distributed along a flight tube

Methodology Applied
Scientific EffectElectromagnetic deflection: Lorentz Force

Data Source

PatentUS12213238B2Reflection target X-ray source with steered beam on target
Publication Date: 2025.01.28 CARL ZEISS X-RAY MICROSCOPY INC
  • US12213238B2 patent drawing
  • US12213238B2 patent drawing
  • US12213238B2 patent drawing

AI summary

A method for controlling an x-ray source comprises generating an electron beam for striking the target to generate x-rays and steering the electron beam to a desired location on the target using a first and a second steering system distributed along a flight tube. In this way, the beam can be steering to the desired location while also passing through the center of a focusing lens to maintain optimal beam characteristics. Also possible is scanning the electron beam over the target to find a fiducial mark. Then, a desired location can be found as an offset from this mark.