Electron Beam Device Synchronization for Electronic State Detection
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Solution Overview
Problem
Existing methods for analyzing electronic properties at the nano and microscale, such as photoelectron spectroscopy, face challenges in controlling light emission conditions to accurately detect changes in the electronic state of samples, particularly in the nano region, due to variations in wavelength, emission intensity, and emission time of light.
Innovation Solution
An electron beam device is developed with an electron optical system, a light pulse emission system, and synchronization processing units that control the detection sampling of emitted electrons in synchronization with the electron beam deflection signal, allowing for precise detection of electronic state changes by adjusting the sampling frequency and light pulse emission intervals.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If light is emitted to the sample to analyze electronic properties, then sensitivity of electronic state detection is improved, but control precision of light emission conditions deteriorates
Solution Approach 1:
The patent employs periodic pulsed light emission synchronized with periodic electron beam scanning. The light pulse is emitted at specific intervals during the electron beam scan, creating a time-resolved detection scheme. This periodic action allows precise control of when light interacts with the sample while maintaining high detection sensitivity through synchronized sampling of emitted electrons at each pixel location.
Solution Approach 2:
The system performs preliminary synchronization setup between the light emission timing and electron beam deflection signal. By pre-establishing the temporal relationship between light pulse emission and electron beam position, the system ensures that detection sampling occurs at the correct moment for each pixel, enabling accurate control of light emission conditions while maintaining high measurement sensitivity.
2Measurement precision
If detection sampling is performed continuously to capture electronic state changes, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The system uses feedback from the electron beam deflection signal to control the timing of detection sampling. The synchronization processing unit monitors the deflection signal and triggers electron detection sampling at appropriate moments based on the actual beam position. This feedback mechanism ensures precise temporal coordination without requiring overly complex predictive control systems.
Solution Approach 2:
The synchronization processing unit acts as an intermediary between the electron beam control system and the electron detection system. It receives the deflection signal as input and generates timing signals for detection sampling, mediating the coordination between these two systems. This intermediary approach simplifies the overall control architecture by centralizing the synchronization logic in a dedicated unit rather than requiring complex direct coupling between multiple subsystems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables high-sensitivity and quantitative detection of electronic state changes, allowing for improved visualization of material differences and enhanced contrast in SEM images, facilitating the analysis of electronic properties and transient changes.
Implementation Method 1
an electron beam (also referred to as a primary electron) accelerated by a voltage applied to an electron source is focused by an electron lens to several nanometers or less. Next, an emitted electron (a secondary electron and a reflected electron) emitted from the sample by the electron beam focused on the sample is detected by a detector
Implementation Method 2
By emitting light to a sample, a carrier is excited in the sample according to the number of photons, and an electronic state changes
Data Source
AI summary
An electron beam device obtains contrast reflecting an electronic state of a sample with high sensitivity. The device includes an electron optical system which emits an electron beam to a sample and detects electrons emitted from the sample; a light pulse emission system that emits a light pulse to the sample; a synchronization processing unit that samples the emitted electrons; an image signal processing unit which forms an image by a detection signal output based upon the emitted electrons detected by the electron optical system; and a device control unit for setting a control condition of the electron optical system. The device control unit sets a sampling frequency for detection sampling of the emitted electrons to be greater than a value obtained by dividing the number of emissions of the light pulse per unit pixel time by the unit pixel time.