Electron Beam Vaporizer Deflection Control

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Solution Overview

Problem

Conventional electron beam vaporization methods using a water-cooled ring crucible with rod infeed face challenges such as solid vaporization material columns sticking to the crucible's peripheral region, obstructing the electron beam and causing shading effects, leading to increased power consumption and wear on the crucible, as well as requiring manual interventions that increase error probability and damage risk.

Innovation Solution

An electron beam vaporizer with a control device that alternately generates first and second deflection patterns, where the first pattern has a lower power density for vaporizing the material on the rod and the second pattern has a higher power density for removing residues on the crucible's edges, preventing columnar residues from forming and reducing manual intervention needs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional electron beam vaporization methods using water-cooled ring crucible with rod infeed are used, then vaporization material can be supplied continuously, but solid vaporization material columns stick to the crucible's peripheral region obstructing the electron beam

Engineering Contradiction:

Improvecontinuous vaporization material supplyVSAvoidshading effect from solid residues

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The control device alternates between a first deflection pattern for vaporizing material on the rod and a second deflection pattern for removing residues on the crucible edges. This periodic switching prevents solid columns from accumulating and obstructing the electron beam, maintaining continuous operation without manual intervention

Inventive Principle:

Principle #19Periodic action

Solution Approach 2:

The second deflection pattern is applied periodically to remove residues before they can accumulate into obstructive solid columns. By performing preliminary cleaning action on the crucible edges, the system prevents the formation of shading effects that would otherwise require manual intervention

Inventive Principle:

Principle #10Preliminary action

2Productivity

If electron beam power is increased to vaporize material faster, then vaporization efficiency improves, but power consumption and crucible wear increase

Engineering Contradiction:

Improvevaporization rateVSAvoidpower consumption

Core Design Contradiction:

ProductivityVSLoss of energy

Solution Approach 1:

The control device directs different deflection patterns to different locations: the first pattern concentrates power on the rod for efficient vaporization, while the second pattern applies higher power density only to the crucible edges for residue removal. This localized approach optimizes vaporization efficiency without uniformly increasing power consumption and crucible wear

Inventive Principle:

Principle #3Local quality

3Reliability

If manual intervention is used to remove solid residues, then crucible performance is maintained, but error probability and damage risk increase

Engineering Contradiction:

Improvecrucible performance maintenanceVSAvoidmanual intervention requirements

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The control device automatically switches between deflection patterns to perform residue removal on the crucible edges without manual intervention. The system serves itself by using the electron beam to clean the crucible, eliminating the need for external intervention and associated risks while maintaining crucible performance

Inventive Principle:

Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach prevents the formation of interfering solid residues, maintains stable power distribution, reduces wear on the crucible, and minimizes manual interruptions, ensuring continuous and efficient vaporization processes.

Implementation Method 1

an electron beam source for generating an electron beam

Methodology Applied

Scientific EffectElectron beam: Electron Beam

Implementation Method 2

the electron beam may be generated having a sufficiently high power that a target may be at least partially melted by means of the electron beam

Methodology Applied

Scientific EffectKinetic energy transfer:

Implementation Method 3

a deflection device for deflecting the electron beam

Methodology Applied

Scientific EffectElectron beam deflection:

Implementation Method 4

a vapor source made of vaporized material of the target may be provided for coating a substrate

Methodology Applied

Scientific EffectVaporization: Evaporation

Data Source

PatentUS11133154B2Electron beam vaporizer and method for vaporizing a vaporization material by means of an electron beam

Publication Date: 2021.09.28 VON ARDENNE ASSET GMBH & CO KG

AI summary

According to various embodiments, a method for vaporizing a vaporization material by means of an electron beam may include the following: generating a first deflection pattern having a first power density at least on an end face of a rod-shaped vaporization material; and, subsequently, generating a second deflection pattern having a second power density on a portion of an outer edge of the rod-shaped vaporization material and a portion of an inner edge of a ring crucible, which encloses the rod-shaped vaporization material, wherein the second power density is greater than the first power density.