Electron Beam Window Foil Metal Gasket Sealing
Solution Overview
Problem
The existing electron beam irradiating devices face difficulties in replacing the window foil due to its deterioration at high temperatures during the vacuum chamber's baking process, as O-rings made of rubber have low heat resistance, causing the window foil and grid to join together.
Innovation Solution
The electron beam irradiating device incorporates a metal gasket pressed between the annular groove section on the grid's surface and the window foil, ensuring gas sealing and allowing for easy replacement of the window foil, even at high temperatures, by using a metal gasket with higher heat resistance than rubber O-rings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a rubber O-ring is used for sealing the window foil to the grid, then the sealing structure is simple and easy to assemble, but the O-ring softens at high temperatures during baking, causing the window foil and grid to join together and making replacement difficult
Solution Approach 1:
The patent changes the material parameter of the sealing element from rubber (low heat resistance) to metal (high heat resistance). The metal pressing member maintains sealing functionality while withstanding the high temperatures of the baking process, preventing the window foil and grid from joining together and enabling easy replacement.
2Productivity
If the window foil is made thin to increase electron beam transmissivity, then the electron beam can pass through more efficiently, but the window foil deteriorates more easily and requires frequent replacement
Solution Approach 1:
The patent provides beforehand cushioning by designing an easy replacement mechanism using the metal pressing member and groove structure. The window foil can be easily removed and replaced by simply detaching the pressing member, preventing operational disruptions due to foil deterioration. This prior design consideration ensures continuous productivity despite the inherent fragility of thin foils.
3Reliability
If the window foil is periodically replaced preventively, then reliable operation is maintained, but device downtime increases and productivity decreases
Solution Approach 1:
The patent introduces dynamic replaceability by designing a modular sealing system where the window foil can be quickly exchanged without complex disassembly. The metal pressing member with its groove structure allows the foil to be easily detached and reattached, transforming the replacement process from a time-consuming procedure to a rapid operation, thus maintaining high device availability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The configuration ensures reliable gas sealing and facilitates easy replacement of the window foil under high-temperature conditions, preventing the window foil and grid from joining, thus maintaining the device's operational integrity.
Implementation Method 1
a metal gasket is pressed between the groove section and the window foil
Implementation Method 2
an electron beam generated from the electron beam generation source 2 exits the vacuum chamber 3 through this window foil
Implementation Method 3
The inside of the vacuum chamber 3 is evacuated by the vacuum pump P
Implementation Method 4
the window foil absorbs a part of the electron beam B, thus generating heat
Data Source
AI summary
Provided is an electron beam irradiating device capable of emitting an electron beam from an electron beam generation source surrounded by a vacuum chamber to outside of the vacuum chamber through an electron beam exit window. The electron beam exit window includes: a grid; a window foil allowing the electron beam to pass therethrough; and a frame-shaped pressing member pressing the window foil against the grid. The surface of the grid has a groove section having an annular shape. A metal gasket is pressed between the groove section and the window foil.