Hierarchical Data Structure for Electron Beam Writing Efficiency
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Solution Overview
Problem
The existing methods for converting design data into writing data for electron beam pattern writing apparatuses are inefficient, leading to large processing times due to the need to process each figure individually and transmit extensive data, with limited flexibility in reconfiguring location data when patterns are repeated.
Innovation Solution
A method that creates writing data using a hierarchical structure, separating location data, pattern data, and link data into distinct files or segments, allowing for efficient processing and transmission by storing each type of pattern data only once and linking them through a link file, enabling parallel processing and reducing data amount.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conversion is performed one by one for all figures, then each figure can be processed individually, but the processing time becomes enormous
Solution Approach 1:
The patent merges identical or similar figures into a single representative figure definition, eliminating redundant processing. Instead of converting each figure individually, the system identifies patterns and consolidates them, thereby maintaining processing accuracy while dramatically reducing overall processing time.
Solution Approach 2:
The patent creates template copies of figure definitions that can be reused across multiple locations. Once a figure is defined once, its definition can be copied and referenced multiple times, avoiding repeated conversion operations while ensuring consistent processing accuracy across all instances.
2Productivity
If data amount is reduced by creating data groups, then transmission time can be reduced, but the data structure has little flexibility and requires much time to reconfigure location data
Solution Approach 1:
The patent segments writing data into distinct components: figure definitions, location information, and parameter data. This segmentation allows efficient compression and transmission by grouping identical figures together, while simultaneously enabling flexible reconfiguration by allowing independent manipulation of location and figure data without requiring complete data restructuring.
Solution Approach 2:
The patent introduces a hierarchical dimension to the data structure, organizing data at multiple levels (figure level, block level, and writing data level). This multi-dimensional organization enables both compact representation for efficient transmission and flexible reconfiguration by allowing operations at different hierarchical levels without affecting the entire data set.
Data Source
AI summary
A creation method of charged particle beam writing data for writing a pattern using a charged particle beam based on design data of circuits includes creating, based on the design data, a location data file including location data, as part of the writing data, the location data being defined for locating one of a plurality of pattern data composed of one or more elementary patterns in each block area of a plurality of block areas, the plurality of block areas being made by virtually dividing a writing area, creating, based on the design data, a pattern data file including pattern data composed of one or more elementary patterns, as part of the writing data, and creating, based on the design data, a link file including link data for linking each of the location data and each of the pattern data, as part of the writing data.