Electron-Optical Column Actuator Layout for Vacuum-Safe Motion
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Solution Overview
Problem
Existing techniques for actuator arrangements in electron-optical columns face challenges due to limited space and the need for effective venting or pumping, which affects the efficiency and yield in semiconductor manufacturing processes.
Innovation Solution
An actuator arrangement with a wall defining a cavity and a casing protruding from the wall, containing an actuator with a force imparter and an actuation mechanism within the casing, and a control element extending through a seal, allowing for efficient operation in a vacuum environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the actuation mechanism is placed inside the vacuum chamber to save space, then the space efficiency is improved, but the vacuum integrity becomes difficult to maintain
Solution Approach 1:
The actuation mechanism is divided into two separate parts: a motor unit located outside the vacuum chamber and a drive unit located inside the vacuum chamber. These parts are connected via a magnetic coupling mechanism that allows force transmission across the vacuum boundary without physical penetration, thus maintaining vacuum integrity while achieving space-efficient actuation.
Solution Approach 2:
A magnetic coupling mechanism acts as an intermediary between the external motor and the internal drive mechanism. This intermediary transfers rotational force across the vacuum boundary without requiring physical penetration of the vacuum seal, thereby maintaining vacuum integrity while enabling actuation of internal components.
2Productivity
If the conduit opening is positioned to overlap with the electron-optical element, then the vacuum application efficiency is improved, but the occlusion of the conduit opening increases
Solution Approach 1:
The electron-optical element is designed with a locally optimized geometry at the conduit opening position. The element features a stepped or tapered structure that allows the vacuum conduit to pass through or alongside it, creating a local modification that reduces occlusion while maintaining the overall functional integrity of the electron-optical component.
Solution Approach 2:
The conduit opening and electron-optical element are positioned in a three-dimensional arrangement where the conduit passes through an opening in the element rather than being blocked by it. This spatial arrangement in multiple dimensions allows the vacuum pathway to coexist with the electron-optical component, minimizing occlusion while maintaining efficient vacuum application.
Data Source
AI summary
Disclosed herein is an actuator arrangement comprising: a wall defining a cavity; a casing protruding from the wall and defining an interior in fluid communication with the cavity; an actuator comprising: a force imparter configured to impart force on a component in the cavity; and an actuation mechanism configured to drive the force imparter, wherein at least part of the actuation mechanism is within said interior of the casing and exposed to the cavity; and a control element configured to control the actuation mechanism, wherein the control element extends through the casing via a seal.