Curved Electron Beam Deflector for Fast BSE and SE Separation

The detector is divided into multiple segments with different energy thresholds, allowing each segment to detect electrons within specific energy ranges. This enables simultaneous detection of both fast BSEs (high energy) and SEs (low energy) by assigning different detector segments to different energy bands, resolving the contradiction between detecting fast BSEs at high acceleration energies and detecting SEs.

The patent changes the energy threshold parameter of different detector segments to create energy-selective detection channels. By adjusting the bias voltages and energy filtering parameters of various detector elements, the system can selectively detect electrons of different energies simultaneously, enabling both fast BSE and SE detection at high acceleration energies.

The detection optics is segmented into multiple independent detection channels, each optimized for specific electron energy ranges. This segmentation allows the system to maintain relatively simple individual detector designs while achieving sophisticated energy discrimination through the combined multi-channel system, balancing device complexity with measurement precision.

The patent designs a multi-functional detection system where a single detection assembly performs multiple functions: detecting fast BSEs, detecting SEs, and providing energy discrimination. By integrating these functions into one universal detection unit with multiple segments, the system avoids the need for entirely separate detection optics for different electron types, managing complexity while maintaining precision.