Electron Density Control With Non-Static Acceleration Profiles

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Solution Overview

Problem

There is a lack of high-brilliance radiation sources at shorter wavelengths required for metrology in high-volume manufacturing applications, particularly for hard X-ray, soft X-ray, and extreme ultraviolet generation, limiting the resolution and throughput of metrology tools.

Innovation Solution

A method and apparatus for controlling electron density distributions using a non-static acceleration profile to generate and accelerate electrons from a pattern of ultracold excited atoms, allowing for coherent hard X-ray, soft X-ray, and extreme ultraviolet generation, with optional features like velocity control, chirp reduction, and bunching of electrons.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional radiation sources are used, then device complexity is reduced, but radiation brilliance and resolution are insufficient for short wavelength metrology

Engineering Contradiction:

ImproveresolutionVSAvoiddevice complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent changes the fundamental parameters of electron generation and acceleration by using ultracold atoms with extremely low temperature and narrow velocity distribution, combined with a non-static acceleration profile that varies in time, to produce highly coherent electron bunches with controlled density distributions at short wavelengths

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent employs a non-static acceleration profile that dynamically varies with time to control the density distribution of electrons during acceleration, enabling precise control of electron bunching and coherence properties that static fields cannot achieve

Inventive Principle:

Principle #15Dynamics

2Measurement precision

If shorter wavelength radiation is used, then resolution is improved, but radiation brilliance is insufficient for high-volume manufacturing

Engineering Contradiction:

ImproveresolutionVSAvoidradiation brilliance

Core Design Contradiction:

Measurement precisionVSIllumination intensity

Solution Approach 1:

The patent changes the temperature parameter of the atom source to ultracold conditions and uses a non-static acceleration profile to simultaneously achieve short wavelength, high brilliance radiation by controlling electron coherence and density distribution

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The non-static acceleration profile employs periodic or pulsed acceleration patterns to bunch electrons into coherent groups, enhancing radiation brilliance through constructive interference of emitted photons at specific wavelengths

Inventive Principle:

Principle #19Periodic action

3Measurement precision

If electron density distribution is controlled using static acceleration fields, then device complexity is reduced, but electron bunching and coherence are insufficient

Engineering Contradiction:

ImprovecoherenceVSAvoidacceleration control

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent transitions from static to dynamic (non-static) acceleration fields that vary with time, enabling precise control of electron density distributions and bunching patterns that cannot be achieved with static fields alone

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The patent prepares ultracold atoms with narrow velocity distributions before acceleration, creating a pre-conditioned electron source that responds more effectively to non-static acceleration profiles and produces better-coherent electron bunches

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method enhances the brilliance of radiation sources, enabling higher resolution and throughput in metrology tools, suitable for high-volume manufacturing processes.

Implementation Method 1

generating a plurality of electrons from a pattern of ultracold excited atoms using an ionization laser inside a cavity

Methodology Applied

Scientific EffectPhotoionization: Photoionisation

Implementation Method 2

accelerating the electrons out of the cavity using a non-static acceleration profile

Methodology Applied

Scientific EffectElectromagnetic acceleration: Electromagnetic Propulsion

Implementation Method 3

for use in hard X-ray, soft X-ray and/or extreme ultraviolet generation

Methodology Applied

Scientific EffectInverse Compton scattering: Inverse Compton Scattering

Data Source

PatentUS12520412B2Methods and apparatus for controlling electron density distributions

Publication Date: 2026.01.06 ASML NETHERLANDS BV

AI summary

A method for controlling a density distribution of electrons provided by an electron source for use in hard X-ray, soft X-ray and/or extreme ultraviolet generation, the method comprising generating a plurality of electrons from a pattern of ultracold excited atoms using an ionization laser inside a cavity, wherein the electrons have a density distribution determined by at least one of the patterns of excited atoms and the ionization laser, and accelerating the electrons out of the cavity using a non-static acceleration profile, wherein the acceleration profile controls the density distribution of the electrons as they exit the cavity.