Electron Detector Scintillator Plate Dynamic Displacement

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Solution Overview

Problem

Conventional electron detectors experience low light intensity detection efficiency over time due to scintillator material degradation and residual gas deposition, leading to inefficient conversion of electron beams into light beams.

Innovation Solution

The method involves directing electron beams onto a scintillator plate at spaced locations, displacing these locations orthogonally across the plate's surface to distribute the electron beam impact evenly, thereby minimizing material deterioration and maintaining detection efficiency. This is achieved through electron optics and actuator systems that adjust the scintillator plate or electron beam deflection, ensuring light from displaced locations is correctly imaged onto light receiving areas.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If electron beams are continuously directed onto the same locations of the scintillator plate, then detection precision is maintained, but the scintillator material deteriorates and residual gas deposits, causing light intensity to decrease over time

Engineering Contradiction:
Improvelight detection efficiencyVSAvoidscintillator material quality
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent implements dynamic displacement of electron beam incident locations on the scintillator plate. Instead of fixed beam positions, the system continuously or periodically shifts the locations where electron beams strike the scintillator surface, preventing localized degradation while maintaining detection functionality across the plate area.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent utilizes the spatial dimension of the scintillator plate by distributing electron beam incidents across multiple locations rather than concentrating them at fixed points. This spatial distribution approach allows the system to exploit the extended surface area of the scintillator, reducing cumulative damage at any single location while maintaining overall detection precision.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If the scintillator plate area is increased to distribute electron beam impact, then material deterioration is reduced, but device complexity and imaging alignment difficulty increase

Engineering Contradiction:
Improvescintillator material longevityVSAvoidoptical imaging system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The system dynamically adjusts the optical imaging parameters to match the displaced electron beam locations. By coordinating the displacement of electron beams with corresponding adjustments in optical imaging, the system maintains accurate mapping between incident locations and detection regions without requiring a fundamentally more complex optical system.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The scintillator plate serves multiple functions: it acts as both the detection medium for electron beam conversion and the spatial distribution surface for reducing degradation. The optical imaging system is designed to accommodate dynamic location changes, making it universally applicable to both fixed and displaced beam configurations.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If electron beams are dispersed across multiple locations, then scintillator material is used more efficiently, but light optics complexity increases to maintain proper imaging

Engineering Contradiction:
Improvescintillator utilization efficiencyVSAvoidlight optics system
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The optical imaging system incorporates dynamic adjustment capabilities that coordinate with electron beam displacement. This allows the imaging system to adapt to changing beam locations in real-time, maintaining proper focus and mapping without requiring multiple static optical paths or complex mechanical reconfiguration mechanisms.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the scintillator material's longevity and detection efficiency by utilizing a larger surface area, reducing the impact of electron beam-induced deterioration and ensuring consistent light detection, even as the electron beams are displaced across the plate.

Implementation Method 1

a scintillator plate having a scintillator material wherein the electron beams, the intensities of which are to be detected, are directed onto the scintillator plate. This scintillator material emits light beams caused by incident electrons.

Methodology Applied
Scientific EffectScintillation: Scintillation

Implementation Method 2

imaging the locations of incidence onto a plurality of light receiving areas of a light detector using light optics so that, by the imaging, each of the locations of incidence is associated with one of the light receiving areas

Methodology Applied
Scientific EffectOptical imaging: Lens

Implementation Method 3

directing a plurality of electron beams onto a scintillator plate using electron optics so that the electron beams are incident onto the scintillator plate at a plurality of locations of incidence disposed at a distance from each other

Methodology Applied
Scientific EffectElectron optics: Electrostatic Lens

Data Source

PatentUS9336982B2Method of detecting electrons, an electron-detector and an inspection system
Publication Date: 2016.05.10 CARL ZEISS MICROSCOPY GMBH
  • US9336982B2 patent drawing
  • US9336982B2 patent drawing

AI summary

An electron-detector comprises a scintillator plate 207, electron optics 204 for directing a plurality of electron beams 9 onto the scintillator plate so that the electron beams are incident onto the scintillator plate at locations of incidence disposed at a distance from each other, a light detector 237 comprising a plurality of light receiving areas 235 disposed at a distance from each other, and light optics for generating a first light-optical image of at least a portion of the scintillator plate at a region 243 where the light receiving areas of the light detector are disposed so that, by the imaging, each of the locations of incidence is associated with a light receiving area; and wherein the electron optics comprise an electron beam deflector 255 for displacing the locations of incidence of the electron beams on the scintillator plate in a direction orthogonal to a normal 249 of a surface 208 of the scintillator plate.