Electron Distortion Unit for AFM Cantilever Obstruction
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Solution Overview
Problem
Existing atomic force microscopes (AFMs) face challenges in accurately observing the interaction between the cross-section of a substrate and the probe due to obstruction by the cantilever, which hinders the monitoring and imaging of the substrate surface.
Innovation Solution
Incorporating a distortion unit, such as an electrode or permanent magnets, within the electron microscope to alter the path of secondary electrons emitted from the substrate, allowing them to reach the detector without being blocked by the cantilever, enabling clear imaging of the probe and substrate cross-section.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the electron microscope monitors the AFM and substrate, then the interaction can be observed, but the cantilever obstructs the secondary electrons from reaching the detector
Solution Approach 1:
The patent introduces a distortion unit as an intermediary component between the substrate and electron detector. This unit generates electromagnetic fields that act as mediators to deflect secondary electrons around the obstructing cantilever, allowing electron trajectories to bypass the obstruction and reach the detector while maintaining the monitoring function.
Solution Approach 2:
The distortion unit changes the trajectory parameter of secondary electrons by applying electromagnetic fields. By modifying the electron path parameters through field-induced deflection, the system overcomes the geometric obstruction caused by the cantilever without altering the physical positions of the components.
2Measurement precision
If the electron beam is emitted vertically to obtain distinct images, then imaging precision is improved, but the cantilever still blocks secondary electrons
Solution Approach 1:
The distortion unit serves as an intermediary that enables secondary electrons to bypass the cantilever obstruction even when the electron beam is vertically aligned for optimal imaging precision. The electromagnetic fields generated by the distortion unit create alternative pathways for electron detection without compromising the vertical beam configuration.
3Reliability
If the distortion unit is added to alter electron paths, then electron detection is improved, but the device complexity increases
Solution Approach 1:
The distortion unit is introduced as a compact intermediary component that integrates electromagnetic field generation capabilities into the existing electron microscope structure. This approach provides an elegant solution to the electron obstruction problem without requiring fundamental redesign of the entire system architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for accurate observation and imaging of the substrate and probe interaction, enhancing the measurement reliability and precision of the AFM by ensuring that secondary electrons are not obstructed, thus providing distinct images of the substrate and probe.
Implementation Method 1
an electron detector detecting secondary electrons generated from the substrate due to the electron beam
Implementation Method 2
The distortion unit may include an electrode distorting the path of the secondary electrons by using an electric field
Implementation Method 3
The electrode may include an anode charged by a positive charge attracting the secondary electrons by gravitation
Implementation Method 4
The distortion unit may further include a plurality of permanent magnets distorting the path of the secondary electrons by using a magnetic field
Data Source
AI summary
Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of a substrate at an atomic level, an electron microscope for measuring the atomic microscope and the substrate, and at least one electrode which distorts the path of a secondary electron on the substrate covered by a cantilever of the atomic microscope so that the secondary electron proceeds to an electron detector of the electron microscope.