Electron Gun Electrode Kit Alignment for Optical Axis Matching
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Solution Overview
Problem
Existing methods for aligning the emission axis of an electron beam with the optical axis of an electron optical system require skilled techniques and are challenging when the electron gun is mounted at a position with significant misalignment.
Innovation Solution
An electron gun comprising a light source, a photocathode, an electrode kit, and an electrode kit drive device that moves the electrode kit in the X-Y plane, allowing for precise alignment of the emission axis with the optical axis, even when the electron gun is mounted out of the optical axis of the electron optical system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If precise mounting of the electron gun is required to align the emission axis with the optical axis, then alignment precision is improved, but the ease of operation deteriorates because skilled techniques are required
Solution Approach 1:
The electron gun system performs self-alignment by automatically adjusting the emission axis to coincide with the optical axis of the electron optical system without requiring skilled manual intervention. The system includes detection means to detect the emission axis and adjustment means to automatically adjust the position of the electron gun, enabling non-skilled personnel to achieve precise alignment.
Solution Approach 2:
The patent replaces manual mechanical adjustment with an automated control system that uses detection means (such as position-sensitive detectors) and control mechanisms to automatically align the emission axis with the optical axis, substituting skilled mechanical operations with automated optical-mechanical systems.
2Adaptability or versatility
If the electron gun is mounted at a position with significant misalignment, then the adaptability of the mounting position is improved, but the alignment precision deteriorates
Solution Approach 1:
The patent introduces dynamic adjustment capabilities that allow the electron gun to be mounted at various positions and then automatically adjusted to achieve proper alignment. The system includes movable components and control mechanisms that enable real-time adjustment of the emission axis regardless of the initial mounting position, making the system adaptable to different mounting scenarios while maintaining alignment precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient alignment of the electron beam emission axis with the optical axis, improving image brightness and resolution by mechanically adjusting the electron gun's position without affecting the electron beam quality.
Implementation Method 1
a photocathode that emits an electron beam in response to receiving light from the light source
Data Source
AI summary
Provided are an electron gun, an electron gun component, an electron beam applicator, and an alignment method that can align the emission axis of an electron beam with the optical axis of the electron optical system of the counterpart device even when misalignment of a mounted position of the electron gun being mounted to the counterpart device is larger. The electron gun includes: a light source; a vacuum chamber; a photocathode that emits an electron beam in response to receiving light from the light source; an electrode kit; and an electrode kit drive device, the electrode kit includes a photocathode supporting part, and an anode arranged spaced apart from the photocathode supporting part, the photocathode is placed on the photocathode supporting part, and the electrode kit drive device moves the electrode kit in an X-Y plane, where one direction is defined as an X direction, a direction orthogonal to the X direction is defined as a Y direction, and a plane including the X direction and the Y direction is defined as the X-Y plane.