Detachable Electron Gun Emitter Assembly for Fast Vacuum Replacement
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Sources of charged particle beams, such as electron guns and ion guns, require easily replaceable emitters due to their limited lifespan, and existing solutions complicate the replacement process, affecting workability and vacuum maintenance.
Innovation Solution
A charged particle beam source design featuring a detachable emitter unit with a supportive insulator and terminals, allowing for easy replacement and alignment on an optical axis, reducing the number of components to be handled and enabling independent baking of the emitter unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the emitter is integrated into the electron gun chamber as a fixed component, then the vacuum environment is well-maintained, but the emitter cannot be easily replaced due to its limited lifespan
Solution Approach 1:
The electron gun is divided into separate modular units: the emitter unit (containing the filament and associated components) can be detached from the main electron gun chamber. This segmentation allows the emitter to be replaced independently without disrupting the entire chamber structure or compromising the vacuum environment, directly resolving the contradiction between replaceability and structural complexity.
2Productivity
If multiple components are handled during emitter replacement, then complete assembly is ensured, but the replacement process becomes time-consuming and complex
Solution Approach 1:
The emitter unit integrates multiple necessary components (filament, support structure, electrical connections) into a single pre-assembled module. This merging allows the entire emitter assembly to be replaced as one unit rather than handling multiple separate components, significantly reducing replacement time and complexity while ensuring all necessary parts are properly assembled.
Solution Approach 2:
The emitter unit is pre-assembled and pre-positioned with all necessary components correctly configured before installation into the electron gun chamber. This preliminary preparation ensures that when replacement is needed, the entire functional unit can be quickly swapped without requiring complex in-situ assembly procedures, thereby improving replacement speed.
3Manufacturing precision
If the emitter unit requires complex mechanical adjustments for alignment, then precise optical axis positioning is achieved, but the replacement process becomes difficult and time-consuming
Solution Approach 1:
The emitter unit incorporates self-aligning features such as positioning pins, tapered interfaces, or keyed connections that automatically guide the emitter into correct alignment with the optical axis upon insertion. This self-service alignment mechanism eliminates the need for complex manual mechanical adjustments during replacement, maintaining high precision while greatly simplifying the replacement operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates quick and efficient replacement of emitters, improves workability, and maintains a high vacuum environment by minimizing the number of components and eliminating the need for complex mechanical adjustments, thus enhancing the operational efficiency of charged particle beam systems.
Implementation Method 1
an electron gun or an ion gun is used as a source of a charged particle beam
Data Source
Figure 1
Figure 2
Figure 3
AI summary
There is provided a charged particle beam source having an emitter that can be replaced easily. The charged particle beam source (100) includes: an electron gun chamber (10); a first unit (20) including both a supportive insulative member (26) mechanically supporting a cable (180) and a first set of terminals (28a, 28b, 28c) electrically connected to the cable (180); and a second unit (30) including both the emitter (35) that releases charged particles and a second set of terminals (32a, 32b, 32c) electrically connected to the emitter (35). The chamber (10) has a side wall (11) provided with a through-hole (11a) in which the first unit (20) is secured. The second unit (30) can be detachably mounted to the first unit (20). Within the chamber (10), the emitter (35) is placed on an optical axis (OA), so that the first and second sets of terminals are brought into contact with each other.