Electron Gun Shielded Aperture Structure for Secondary Electron Suppression

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Solution Overview

Problem

In charged particle beam devices like scanning electron microscopes, secondary electrons generated within the electron gun can mix with the primary electron beam, causing flare that decreases the signal-to-noise ratio and resolution of observation images.

Innovation Solution

An electron gun design featuring an extraction electrode with a diaphragm and two shields positioned above and below the diaphragm, where the diaphragm has a smaller opening diameter than the shields, effectively blocking secondary electrons and preventing them from mixing with the primary electron beam.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single diaphragm is used in the extraction electrode, then the structure is simple, but secondary electrons can mix with the primary electron beam causing flare

Engineering Contradiction:
Improvestructure complexityVSAvoidflare
Core Design Contradiction:
Device complexityVSObject-affected harmful factors

Solution Approach 1:

The extraction electrode is divided into multiple functional zones: a first diaphragm for limiting primary electron beam passage, a second diaphragm for limiting secondary electron passage, and intermediate electrodes positioned between them. This segmentation allows each component to address specific electron control functions, effectively preventing secondary electron mixing while maintaining structural organization.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Intermediate electrodes are introduced between the first and second diaphragms to create additional electric field zones. These intermediary elements modify the electric field distribution to prevent secondary electrons generated at the diaphragms from reaching the primary beam path, thereby eliminating flare without requiring a single complex barrier.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If multiple diaphragms and shields are added to block secondary electrons, then flare is reduced, but the device complexity increases

Engineering Contradiction:
ImproveflareVSAvoidstructure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The intermediate electrodes serve multiple functions: they create electric field barriers to block secondary electrons, maintain potential gradients for primary electron acceleration, and work cooperatively with both diaphragms. This multi-functionality reduces the need for separate dedicated components, thereby limiting complexity growth while achieving effective flare suppression.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The electron gun structure is organized in nested layers: the first diaphragm is positioned within the extraction electrode, the intermediate electrodes are positioned between the diaphragms, and the second diaphragm is positioned downstream. This nested arrangement allows compact integration of multiple functional elements without excessive spatial occupation, managing device complexity through efficient spatial organization.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design suppresses the mixing of secondary electrons with the primary electron beam, reducing flare occurrence and enhancing the accuracy and resolution of observation images in charged particle beam devices.

Implementation Method 1

an extraction electrode that generates a strong electric field in order to extract electrons to a tip of an electron source

Methodology Applied
Scientific EffectElectric field: Electric Field

Implementation Method 2

an acceleration electrode for accelerating the extracted electron beam

Methodology Applied
Scientific EffectElectric field: Electric Field

Data Source

PatentUS11978609B2Electron gun and charged particle beam device equipped with electron gun
Publication Date: 2024.05.07 HITACHI HIGH TECH CORP
  • US11978609B2 patent drawing
  • US11978609B2 patent drawing
  • US11978609B2 patent drawing

AI summary

An electron gun EG in which mixing of secondary electrons is suppressed is provided. The electron gun EG has an electron source 1, an extraction electrode 2 for extracting an electron beam E1 from the electron source 1, and an acceleration electrode for accelerating the extracted electron beam E1. The extraction electrode 2 includes a diaphragm 4 for allowing a part of the electron beam E1 to pass through, a shield 5 positioned above the diaphragm 4 apart from the diaphragm 4, and a shield 6 positioned below the diaphragm 4 apart from the diaphragm 4. The diaphragm 4 has an opening OP4 having an opening diameter D4, the shield 5 has an opening OP5 having an opening diameter D5 which is greater than the opening diameter D4, and the shield 6 has an opening OP6 having an opening diameter D6 which is greater than the opening diameter D4.