Electron Holography Aberration Correction via Propagator Parameter Modification

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Solution Overview

Problem

Existing electron holography techniques suffer from image aberrations such as astigmatism, coma, and skewing due to non-linear electron trajectories, leading to inaccurate reconstruction of holograms.

Innovation Solution

A system and method that modifies sequenced parameters of an array upon which the electron hologram image is constructed, using a propagator function to generate a propagated image with reduced aberrations, thereby improving reconstruction accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If standard electron holography propagation methods are used, then the reconstruction process is simple, but image aberrations such as astigmatism, coma, and skewing occur due to non-linear electron trajectories

Engineering Contradiction:
Improvereconstruction accuracyVSAvoidpropagation method complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent modifies the propagator function by changing its parameters to account for non-linear electron trajectories. Specifically, it adjusts the relationship between array indices and physical coordinates in the propagator to correct for astigmatism, coma, and skewing, thereby improving reconstruction accuracy without requiring complex hardware modifications

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces complex mechanical/physical correction systems with a computational approach by modifying the software-based propagator function. Instead of using complex physical optics components to correct aberrations, the invention uses algorithmic modifications to the propagation calculation to achieve correction

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If hardware modifications are made to correct electron trajectory non-linearities, then aberration correction can be achieved, but the system complexity and cost increase

Engineering Contradiction:
Improveaberration correctionVSAvoidhardware complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent substitutes physical/optical correction hardware with a computational solution by modifying the propagator function. The invention achieves aberration correction through software-based modifications to the propagation algorithm rather than through physical hardware changes, thereby maintaining system simplicity while improving reliability

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the parameters and functional form of the propagator to compensate for hardware-induced aberrations. By modifying how the propagator calculates electron wave propagation based on corrected parameter relationships, the system achieves reliable aberration correction without adding complex hardware components

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS20250371687A1Correction of aberrations in in-line electron holography
Publication Date: 2025.12.04 FEI CO
  • US20250371687A1 patent drawing
  • US20250371687A1 patent drawing
  • US20250371687A1 patent drawing

AI summary

Embodiments herein relate to a process for electron holography image aberration reduction. A system can comprise a memory that stores, and a processor that executes, computer executable components. The computer executable components can comprise a propagating component that reduces hologram aberration of an electron hologram (EH) image by modifying of a pair of sequenced parameters of an array upon which the EH image is constructed, resulting in a modified array, and a generating component that generates a propagated EH image using a propagator comprising the modified array.