Electron Microscope Deflector for Fast Image Acquisition
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Solution Overview
Problem
Scanning transmission electron microscopes face challenges in recording convergent beam electron diffraction patterns quickly due to external disturbances and sample drifts caused by temperature variations, necessitating a reduction in image recording time.
Innovation Solution
An electron microscope system that includes an illumination system, an imaging system, an electron deflector, and an imager, where the electron deflector varies the active electron incident region on the imager's photosensitive surface in response to changes in illumination conditions, allowing for the recording of multiple images as one image, thereby shortening the recording time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an image is recorded whenever the illumination conditions are varied, then the measurement precision is improved, but the recording time is lengthened
Solution Approach 1:
The photosensitive surface of the imager is divided into multiple regions, with each region dedicated to recording images under specific illumination conditions. This segmentation allows simultaneous recording of multiple images under different illumination conditions without requiring sequential readout operations, thereby reducing recording time while maintaining measurement precision
Solution Approach 2:
The patent introduces a spatial dimension solution by dividing the photosensitive surface into multiple regions. Instead of recording images sequentially in time, the system records multiple images simultaneously in space by directing electrons under different illumination conditions to different regions of the photosensitive surface, thus eliminating the time penalty associated with sequential recording
2Measurement precision
If the image recording time is lengthened, then the measurement precision is improved, but the instrument is more affected by external disturbances and sample drifts
Solution Approach 1:
The photosensitive surface is segmented into multiple regions that simultaneously record images under different illumination conditions. This allows the system to capture all necessary measurement data in a single, short exposure period, eliminating the prolonged recording time that would expose the instrument to external disturbances and sample drifts, thereby maintaining both measurement precision and reliability
Solution Approach 2:
The electron deflector is configured in advance to direct electrons under various illumination conditions to different predetermined regions of the photosensitive surface. This preliminary arrangement ensures that all images are captured simultaneously during a single short recording period, preventing the degradation of reliability that would occur with extended recording times
3Measurement precision
If plural images are recorded as separate images, then the measurement precision is improved, but the device complexity is increased
Solution Approach 1:
The patent merges the functionality of multiple separate imaging systems into a single imager with a divided photosensitive surface. By combining multiple image recording functions into one device and using a single electron deflector to direct electrons to different regions, the system maintains measurement precision while reducing device complexity compared to using multiple independent imaging systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables faster image acquisition by reducing the need for individual readouts of images under varying conditions, minimizing the impact of external disturbances and sample drifts, and preventing overlap of adjacent images on the imager's surface.
Implementation Method 1
an electron deflector for deflecting the electrons transmitted through the sample
Implementation Method 2
an imager which has a photosensitive surface for detecting the electrons transmitted through the sample
Implementation Method 3
an imaging system for focusing electrons transmitted through the sample
Data Source
AI summary
There is provided an electron microscope capable of recording images in a shorter time. The electron microscope (100) includes: an illumination system (4) for illuminating a sample (S) with an electron beam; an imaging system (6) for focusing electrons transmitted through the sample (S); an electron deflector (24) for deflecting the electrons transmitted through the sample (S); an imager (28) having a photosensitive surface (29) for detecting the electrons transmitted through the sample (S), the imager (28) being operative to record focused images formed by the electrons transmitted through the sample (S); and a controller (30) for controlling the electron deflector (24) such that an active electron incident region (2) of the photosensitive surface (29) currently hit by the beam is varied in response to variations in illumination conditions of the illumination system (4).