Electron Microscope Image Distortion Measurement via Auto-Correlation
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Solution Overview
Problem
Current electron microscope images suffer from distortion due to optical defects and improper scanning techniques, leading to inaccurate measurements of specimen length and shape, necessitating a more precise distortion measurement method.
Innovation Solution
A distortion measurement method involving a distortion measurement specimen with structures arranged in a lattice, where an auto-correlation function is calculated from the electron microscope image, and distortion is measured based on a pattern formed by connecting peak positions, specifically an ellipse.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional electron microscope imaging is performed, then images can be obtained, but distortion occurs due to optical defects and scanning issues, leading to inaccurate measurements
Solution Approach 1:
The patent introduces an intermediary measurement process using auto-correlation function analysis. Instead of directly measuring distorted features in the image, the method uses the auto-correlation function as an intermediary mathematical tool to extract distortion information from the image data, thereby enabling accurate distortion measurement despite optical defects and scanning issues
Solution Approach 2:
The patent replaces direct physical measurement methods with mathematical image processing. Instead of using mechanical measurement tools or direct geometric analysis of distorted features, the invention substitutes a mathematical approach using auto-correlation functions to calculate distortion, achieving higher precision without physical contact or additional mechanical systems
2Measurement precision
If direct measurement of specimen features is performed on distorted images, then measurement process is simple, but measurement accuracy deteriorates due to image distortion
Solution Approach 1:
The patent substitutes complex direct measurement procedures with a mathematical image processing approach. The auto-correlation function method replaces manual or mechanical measurement techniques, using computational mathematics to extract distortion parameters from image data, thereby achieving high measurement precision through software-based analysis rather than complex physical measurement systems
Solution Approach 2:
The patent transforms the measurement problem from spatial domain to frequency domain by using auto-correlation functions. This parameter transformation allows distortion information to be extracted more accurately by analyzing the statistical relationships between image pixels, converting a geometric measurement problem into a mathematical parameter analysis problem
Data Source
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AI summary
A distortion measurement method for an electron microscope image includes: loading a distortion measurement specimen (1) having structures arranged in a lattice to a specimen plane of an electron microscope (100) or a plane (14) conjugate to the specimen plane in order to obtain an electron microscope image of the distortion measurement specimen (1); and measuring a distortion from the obtained electron microscope image of the distortion measurement specimen (1).