Electron Microscope Single Electromagnet Lens Merging
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Solution Overview
Problem
Conventional electron microscopes have a complex and expensive projection system for imaging the diffraction plane, which requires a long beam path and significant space, making them cumbersome and costly.
Innovation Solution
An electron microscope configuration using a single electromagnet to provide the functions of three electron-optical lenses, allowing for the imaging of the diffraction plane at a detector without a separate projection system, with adjustable magnetic fields to focus the electron beam and generate magnified images, enabling the detection of both bright and dark field electrons.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional projection system with multiple electron-optical lenses is used to image the diffraction plane, then the diffraction plane can be imaged on the detector, but the device complexity increases and the beam path length becomes excessive
Solution Approach 1:
The patent combines the functions of multiple electron-optical lenses (condenser lens, objective lens, and projection lens) into a single electromagnet. This single electromagnet generates a magnetic field that performs the combined optical functions, eliminating the need for separate projection system components and reducing overall device complexity while maintaining diffraction plane imaging capability.
Solution Approach 2:
The single electromagnet is designed to perform multiple functions simultaneously: it acts as both the objective lens for forming the diffraction image and as the projection lens for magnifying and projecting it onto the detector. This multi-functional design reduces the number of components needed in the electron optical path.
2Measurement precision
If a conventional projection system with multiple electron-optical lenses is used to image the diffraction plane, then the diffraction plane can be imaged on the detector, but the beam path length becomes excessive and space requirements increase
Solution Approach 1:
By merging the objective lens and projection lens functions into a single electromagnet, the patent eliminates the physical space required for separate lens assemblies and their associated magnetic fields. This consolidation dramatically shortens the beam path length from the sample to the detector while preserving the ability to form and project the diffraction image.
Solution Approach 2:
The multi-functional electromagnet performs both objective and projection lens functions at essentially the same location in space, eliminating the need for a long beam path that would be required if these functions were performed by separate components arranged sequentially along the electron optical axis.
3Measurement precision
If a conventional projection system with multiple electron-optical lenses is used to image the diffraction plane, then the diffraction plane can be imaged on the detector, but the device becomes expensive and requires significant space
Solution Approach 1:
The patent merges multiple expensive electron-optical lens components into a single electromagnet assembly. This consolidation reduces the total volume of the instrument, decreases the footprint required for the microscope, and lowers the overall cost by eliminating redundant components and simplifying the magnetic field generation system.
Solution Approach 2:
By designing a single electromagnet that performs multiple optical functions (objective lens, projection lens), the patent reduces the number of specialized components needed, thereby reducing both the physical space required and the manufacturing cost of the system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration simplifies the electron microscope design, reduces space requirements, and allows for efficient detection of electrons scattered at various angles, enhancing imaging capabilities while reducing costs.
Implementation Method 1
a first electromagnet arranged along the beam path between the electron beam source and the detector... the current supply is adjustable such that the magnetic field which can be generated by the first electromagnet has, on the beam, an effect of three electron-optical lenses
Data Source
AI summary
An electron microscope includes an electron beam source, a first electromagnet, a second electromagnet and a detector. The field generated by the first electromagnet has an effect of three lenses subsequently arranged along the beam path. A first lens of these lenses is arranged upstream of the object plane and focuses the beam at the object plane. The second lens of these three lenses is arranged downstream of the object plane. The third lens of these three lenses generates an image of a diffraction plane of the second lens at the detector. The magnetic field generated by the second electromagnet has an effect of a fourth lens and can be changed in order to change a size of the image of the diffraction plane of the second lens on the detector.