Electron Microscope Scintillator Optics for Wider Electron Detection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional electron beam microscopes face limitations in detecting electrons due to the geometric extent and additional components of the electron detector, which restricts their use to specific positions within the microscope.
Innovation Solution
The electron beam microscope incorporates a scintillator arrangement with a scintillator body that generates light from incident electrons, an optical element with an optically effective surface closer to the object location than the scintillator, and a light detector to convert light into electrical signals, allowing for extended detection capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a conventional electron detector is used with additional components like light guides and electrical lines, then the detector can convert electrons to electrical signals, but the geometric extent and additional components prevent electrons from being detected at desired positions within the microscope
Solution Approach 1:
The patent extracts the light guide and electrical line components from the electron detector assembly, leaving only the scintillator body that converts electrons to light. This extracted light detection function is then integrated into the electron microscope's existing optical system, eliminating the geometric constraints imposed by traditional detector components.
Solution Approach 2:
The patent introduces an optical element (mirror or lens) as an intermediary between the scintillator body and the light detector. This intermediary redirects the light generated by the scintillator to the light detector positioned in a different location, enabling electron detection at positions that would otherwise be inaccessible due to the microscope's geometric constraints.
2Measurement precision
If the scintillator body is positioned closer to the object location, then electrons generated at the object can be detected, but the light generated by the scintillator must be redirected to reach the light detector
Solution Approach 1:
The patent employs curved optical surfaces (spherical or elliptical mirrors, or curved lenses) to redirect light from the scintillator body positioned near the object to the light detector. The curved geometry of these optical elements enables efficient light redirection while maintaining a compact configuration that allows the scintillator to be positioned close to the object for improved electron detection precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables the detection of electrons that were previously undetectable, enhancing the electron beam microscope's detection area and improving its operational flexibility.
Implementation Method 1
The scintillator arrangement comprises a scintillator body which is formed from a scintillator material that generates light using incident electrons
Implementation Method 2
a light detector for detecting light generated by the scintillator body or the scintillator arrangement and for converting the light into electrical signals
Data Source
AI summary
An electron beam microscope comprises an electron beam source, an objective lens and an electron detector. The electron detector comprises a scintillator arrangement between the electron beam source and an object location so that electrons generated at the object are incident on a scintillator body that is formed from a scintillator material that generates light from incident electrons. The electron detector also comprises a light detector for detecting the light generated by the scintillator body and an optical element comprising an optically effective surface between the scintillator arrangement and the object location and arranged between the scintillator body and the light detector in a beam path of the light detected by the light detector.