Electron Microscope Spherical Receiver Alignment

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Solution Overview

Problem

In a side entry type sample moving mechanism of an electron microscope, it is challenging to perfectly match the center of a spherical fulcrum and the axis of the sample moving mechanism at any observation position, leading to field-of-view and focus shifts when the sample is tilted, which complicates the acquisition of continuous tilted images required for tomography.

Innovation Solution

The implementation of a first spherical receiver fixed to the electron microscope column, sliding on a spherical fulcrum at the sample holder's tip end, and a second spherical receiver that slides along a spherical surface centered on the first receiver's axis, ensuring precise alignment and minimizing mechanical shifts during tilting.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a side entry type sample moving mechanism is used, then the sample can be moved by swinging motion around the center of a spherical surface, but it is difficult to perfectly match the center of the spherical fulcrum and the axis of the sample moving mechanism at any observation position, causing field-of-view shift and focus shift when the sample is tilted

Engineering Contradiction:
Improvesample tilting operationVSAvoidfield-of-view position accuracy
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

A spherical receiver mechanism is introduced as an intermediary between the sample holder and the column. This spherical receiver includes a spherical fulcrum that contacts the column, allowing the sample holder to tilt while maintaining precise alignment through the spherical contact interface. The spherical receiver acts as a mediator that decouples the tilting motion from direct mechanical connections, thereby reducing field-of-view and focus shifts.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention employs spherical surfaces and spherical fulcrums in the sample moving mechanism. The spherical geometry allows for smooth rotational and tilting motions while maintaining constant contact and precise alignment. The spherical receiver with its spherical fulcrum enables the sample holder to pivot and tilt around a fixed center point, ensuring that the sample remains properly aligned with the electron beam axis during tilting operations.

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Productivity

If the sample is tilted for tomography imaging, then continuous tilted images can be acquired, but field-of-view shift and focus shift occur requiring time-consuming correction

Engineering Contradiction:
Improveimage acquisition speedVSAvoidtime for correcting field-of-view and focus shifts
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The spherical receiver serves as an intermediary mechanism that enables smooth, continuous tilting motions without introducing mechanical play or alignment errors. By using the spherical fulcrum contact interface, the system achieves stable tilting operation that minimizes field-of-view and focus shifts, thereby reducing the time required for correction and enabling faster acquisition of continuous tilted images for tomography.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If the center of spherical fulcrum and axis of sample moving mechanism are not perfectly matched, then mechanical alignment is simpler, but field-of-view and focus shifts increase when the sample is tilted

Engineering Contradiction:
Improvemechanical alignmentVSAvoidalignment precision between fulcrum center and mechanism axis
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The spherical receiver acts as an intermediary that compensates for minor misalignments between the spherical fulcrum center and the mechanism axis. The spherical geometry provides a degree of freedom that allows the system to accommodate small manufacturing tolerances while maintaining functional alignment during tilting operations, thus reducing the stringency of manufacturing precision requirements.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS11164717B2Electron microscope
Publication Date: 2021.11.02 HITACHI HIGH TECH CORP
  • US11164717B2 patent drawing
  • US11164717B2 patent drawing
  • US11164717B2 patent drawing

AI summary

An object of the invention is to provide a technique of capturing images at higher speed and higher magnification when acquiring continuous tilted images with an electron microscope. The electron microscope of the invention includes a first spherical receiver fixed to a column of the electron microscope and configured to slide with a spherical fulcrum provided at a tip end of a sample holder; a spherical surface part provided on the column; and a second spherical receiver provided outside the column. The spherical surface part and the second spherical receiver slide on a contact part between the spherical surface part and the second spherical receiver, and a track of the slide is along a spherical surface centered on a central axis of the first spherical receiver, so that a view shift and a focus shift from an observation position of a sample can be reduced.