Electron Microscope Stage With Elastic Struts

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Solution Overview

Problem

Existing positioning systems for workpieces in beam systems face challenges with inaccurate positioning and vibrations, which affect the quality of imaging and processing in instruments like scanning electron microscopes and ion columns.

Innovation Solution

A positioning system comprising a first carriage with drive units for translation and rotation along multiple axes, coupled to a second carriage with rotational drive units, and elastic strut members for stabilization, allowing precise movement and positioning of workpieces within a vacuum chamber or beam system.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional actuators are used for positioning, then positioning capability is provided, but vibrations occur and positioning accuracy deteriorates

Engineering Contradiction:

Improvepositioning accuracyVSAvoidvibrations

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces conventional mechanical actuators with a piezoelectric actuator that utilizes the piezoelectric effect to convert electrical signals directly into mechanical displacement. This substitution eliminates mechanical vibrations associated with traditional motors while achieving sub-nanometer positioning accuracy through direct piezoelectric expansion and contraction.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs feedback control that dynamically adjusts the drive signal parameters to the piezoelectric actuator based on real-time position detection. By changing electrical parameters (voltage, frequency, amplitude) in response to detected position deviations, the system compensates for positioning errors and minimizes vibrations, achieving both high precision and stability.

Inventive Principle:

Principle #35Parameter changes

2Adaptability or versatility

If multi-axis positioning capability is added, then positioning versatility is improved, but system complexity increases

Engineering Contradiction:

Improvepositioning capabilityVSAvoidsystem complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent integrates multiple positioning functions (X-Y plane movement, Z-axis height adjustment, and tilt rotation) into a single unified stage assembly. The carrier element serves multiple purposes: it holds the workpiece, provides multi-axis movement through integrated piezoelectric actuators, and enables rotational tilt adjustments, thereby achieving versatile positioning capability without proportionally increasing system complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent combines multiple drive units and carriage elements into an integrated positioning system where the first carriage, second carriage, and carrier element work as a unified mechanism. By merging these components and their control systems, the patent achieves complex multi-axis positioning functionality while reducing overall system complexity through integration rather than separate independent systems.

Inventive Principle:

Principle #5Merging (Combining)

3Stability of the object's composition

If elastic strut members are used for stabilization, then vibration resistance is improved, but structural complexity increases

Engineering Contradiction:

Improvepositioning stabilityVSAvoidstructural complexity

Core Design Contradiction:

Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent uses elastic strut members that function as flexible support elements between the carriages and column. These elastic struts provide vibration damping and positional stability through their inherent elasticity, allowing the structure to absorb disturbances while maintaining precise positioning. The flexible nature of these struts reduces the need for additional rigid stabilization components.

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The elastic strut members act as intermediary elements between the rigid carriage structures and the column, serving as vibration-isolating mediators. These struts transmit necessary mechanical forces while filtering out high-frequency vibrations, thereby stabilizing the workpiece position without requiring complex active vibration cancellation systems.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves precise positioning and minimizes vibrations, enhancing the quality of imaging and processing by allowing accurate movement along multiple axes and rotational adjustments, thereby improving the resolution and stability of workpiece positioning.

Implementation Method 1

The first carriage can be coupled to the second carriage via a plurality of elastic strut members

Methodology Applied

Scientific EffectElasticity: Elasticity

Data Source

PatentUS11244805B2Electron microscope stage

Publication Date: 2022.02.08 FEI CO

AI summary

A positioning system for an electron microscope includes a first carriage comprising a holder for holding a workpiece and a second carriage. The first carriage being coupled to one or more first drive units configured to position the workpiece along first, second, and third axes, and along a first tilt axis. The second carriage housing the one or more first drive units and being coupled to one or more second drive units configured to position the workpiece along a second tilt axis.