Electron-Optical Assembly With Recessed HV Connection Shielding
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Solution Overview
Problem
Existing electron-optical devices face issues with stray electromagnetic fields diverting charged particle beams, high voltage connections leading to electron creep, and aberrations in multi-beam inspection systems, which degrade image quality and throughput.
Innovation Solution
A charged particle-optical assembly with a recessed conductive body and electrical insulator configuration for high voltage cable insertion, reducing electron creep and aberrations by providing a field-free volume for electrical connections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high voltage connections are made in conventional electron-optical devices, then the device can operate with required voltage, but electron creep occurs causing discharge and reduced reliability
Solution Approach 1:
The patent extracts the high voltage connection from the conventional electrode structure and relocates it to a recessed cavity within the electromagnetic shield. This separation removes the connection point from the high-field region, preventing electron creep while maintaining operational voltage
Solution Approach 2:
The recessed cavity acts as an intermediary structure between the external high voltage connection and the internal electrode. It provides a field-free transition zone that mediates the voltage application, allowing high voltage to be applied without creating harmful electric fields in the beam path
2Stability of the object's composition
If electromagnetic shields are added to block stray fields, then beam stability improves, but device complexity and size increase
Solution Approach 1:
The patent merges the electromagnetic shield with the high voltage connection structure by integrating the recessed cavity directly into the shield body. This combination eliminates the need for separate shielding components and simplifies the overall device structure while maintaining beam stability
Solution Approach 2:
The electromagnetic shield serves multiple functions: it blocks stray electromagnetic fields from diverting the beam, provides structural support for the high voltage connection, and creates the recessed cavity for field-free voltage application. This multi-functionality reduces device complexity
3Device complexity
If conventional electrode structures are used, then device simplicity is maintained, but stray electromagnetic fields divert the charged particle beam
Solution Approach 1:
The patent extracts the high voltage connection point from the conventional exposed electrode structure and relocates it within a recessed cavity. This extraction removes the vulnerable connection point from the path of stray electromagnetic fields, preventing beam diversion while maintaining structural simplicity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the reliability of high voltage connections and improves image quality and throughput in electron-optical devices by minimizing electron creep and aberrations.
Implementation Method 1
a recess is defined within the conductive body and is configured to provide a field free volume for insertion of a high voltage cable
Implementation Method 2
the conductive body comprises an electrical insulator spaced away from the planar charged particle-optical element and providing a at least part of a surface of the conductive body
Data Source
AI summary
A charged particle-optical assembly configured to direct a plurality of beams of charged particles in a beam grid towards a sample location, the charged particle-optical assembly including: a planar charged particle-optical element configured to operate at a voltage on charged particle beams of a beam grid, the charged particle-optical element including a plurality of apertures for the paths of different beams of the beam grid; a conductive body electrically connected to the charged particle-optical element, wherein a recess is defined within the conductive body and is configured to provide a field free volume for insertion of an electrical coupling to electrically connect the charged particle-optical element via the electrical coupling with an electrical power source; and an electrical insulator covering at least part of a surface of the conductive body, the surface facing away from the charged particle-optical element.