Electron-Optical Column Optical Power Isolation at High Voltage

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing electron-optical columns face challenges in maintaining high potential differences without risking electrostatic breakdown, and there is a need for efficient power delivery to electronic components within the vacuum environment while avoiding magnetic fields and bulkiness.

Innovation Solution

A charged-particle apparatus with an optical column that includes a power converter to convert photonic radiation into electricity, where the power source is electrically isolated from the converter, allowing for optical energy transport to electronic devices within the high voltage region, reducing the risk of electrical breakdown and magnetic interference.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If high potential differences are applied between electrodes to achieve desired electron optical performance, then electron optical performance is improved, but the risk of catastrophic electrostatic breakdown increases

Engineering Contradiction:

Improveelectron optical performanceVSAvoidelectrostatic breakdown risk

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent introduces an optical intermediary system (laser diode, optical waveguide, photodetector) to transfer energy and control signals across the vacuum boundary. The laser diode converts electrical energy to optical energy, the waveguide transmits this energy optically through the vacuum barrier, and the photodetector converts it back to electrical energy on the high-voltage side, enabling power delivery without direct electrical connection and thus preventing electrostatic breakdown while maintaining electron optical performance

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the traditional mechanical/electrical power delivery system (direct electrical connection through vacuum feedthroughs) with an optical energy transmission system. By using photonic radiation instead of direct electrical conduction to cross the vacuum boundary, the system eliminates the risk of electrostatic breakdown while still providing the necessary power to electronic components in the high-voltage region

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Use of energy by moving object

If traditional power delivery methods are used to power electronic devices in the vacuum environment, then power delivery is achieved, but magnetic field interference and bulkiness occur

Engineering Contradiction:

Improvepower delivery to electronic devicesVSAvoidmagnetic field interference

Core Design Contradiction:

Use of energy by moving objectVSObject-affected harmful factors

Solution Approach 1:

The patent substitutes electromagnetic power delivery (which generates magnetic fields) with optical energy transmission. The laser diode generates photonic radiation that travels through the vacuum via an optical waveguide to the photodetector, providing power to electronic devices without generating the magnetic field interference associated with traditional electrical power delivery methods through vacuum feedthroughs

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables reliable operation at high voltages within the electron-optical column, enhancing electron beam inspection and lithography processes by preventing electrical breakdown and minimizing magnetic field interference, thus improving the quality and efficiency of electron beam manipulation and detection.

Implementation Method 1

a power converter configured to receive photonic radiation from the power source, to convert the received photonic radiation into electricity

Methodology Applied

Scientific EffectPhotovoltaic effect: Photovoltaic Effect

Implementation Method 2

The path of the beam of charged particles is controlled by electromagnetic fields (i.e. electrostatic fields and magnetic fields)

Methodology Applied

Scientific EffectElectromagnetic field: Electromagnetic Induction

Implementation Method 3

The interactions between the material structure at the probing spot and the landing electrons from the beam of electrons cause electrons to be emitted from the surface, such as secondary electrons

Methodology Applied

Scientific EffectElectron impact: Electron Impact Desorption

Data Source

PatentUS20240038485A1Electron-optical device

Publication Date: 2024.02.01 ASML NETHERLANDS BV

AI summary

Disclosed herein is a charged-particle apparatus configured to inspect a sample with a charged-particle beam. The charged-particle apparatus comprises a detector assembly or an array of multipole elements. The charged-particle apparatus comprises an electronic device, a power source configured to output radiation, and a power converter configured to receive radiation from the power source, to convert the received radiation into electrical energy and to output the electrical energy to the electronic device. The power source is electrically isolated from the power converter.