Electron-Photon Correlation Microscopy Without Pulsed Beam Blur
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Solution Overview
Problem
Existing electron microscopes face challenges in achieving spatial resolutions below 10 nm due to the space-charge effect of pulsed electron beams, which spread the electron and energy distribution, making it difficult to visualize structures smaller than 100 nm.
Innovation Solution
An electron microscope design that uses a continuous electron beam emitted from an FE electron gun, combined with an electron detector and photon detector, computes electron-photon time correlation to identify samples based on fluorescence lifetime and emission transition probabilities, eliminating the need for a pulsed electron beam.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a pulsed electron gun is used to improve spatial resolution, then temporal information can be obtained, but the space-charge effect spreads the electron beam and prevents resolution below 10 nm
Solution Approach 1:
The invention extracts the timing information measurement from the electron beam pulse itself and transfers it to the photon emission timing. By using a continuous electron beam instead of pulsed electrons, the space-charge effect is eliminated while timing information is preserved through the fluorescence lifetime measurement of photons emitted when electrons interact with the sample.
Solution Approach 2:
The invention introduces photons as an intermediary carrier to transfer timing information. Instead of using timed pulsed electrons directly, the electron beam excites the sample to emit photons, and the timing of these photons (relative to electron detection) carries the temporal information, thereby avoiding the space-charge effect of pulsed electrons.
2Measurement precision
If a pulsed electron gun is used to achieve high spatial resolution, then temporal correlation can be measured, but the system complexity and cost increase significantly
Solution Approach 1:
The invention removes the complex pulsed electron gun system entirely and extracts only the necessary function (timing measurement) to be performed through photon detection. The continuous electron beam eliminates the need for pulsed generation hardware, reducing system complexity while maintaining timing measurement capability through electron-photon correlation analysis.
3Device complexity
If conventional fluorescence lifetime microscopy is used to achieve 100 nm resolution, then the system is simple and inexpensive, but structures smaller than 100 nm cannot be resolved
Solution Approach 1:
The invention merges the advantages of electron microscopy (high spatial resolution capability) with fluorescence lifetime microscopy (temporal measurement capability). By combining electron beam irradiation with photon emission timing detection, the system achieves both nanometer-scale spatial resolution and fluorescence lifetime measurement, overcoming the diffraction limit of conventional optical microscopy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Achieves high spatial resolution below 10 nm without the need for a massive pulsed electron gun, simplifying the microscope and reducing costs while providing detailed structural and functional information about samples.
Implementation Method 1
the electron detector preferably detects the electrons transmitted through or reflected by the sample
Implementation Method 2
the electron detector preferably detects the electrons transmitted through or reflected by the sample
Implementation Method 3
a photon detector for detecting photons emitted from the sample when the sample is irradiated with the electrons
Implementation Method 4
a computing device that computes, for each of the detected photons, a time difference between the time of irradiation of the sample with the electron and the time of emission of the photon from the sample
Data Source
AI summary
An electron microscope of an embodiment according to the present invention includes an electron gun for irradiating a sample with electrons; an electron detector for detecting the electrons with which the sample is irradiated; a photon detector for detecting photons emitted from the sample when the sample is irradiated with the electrons; and a computing device that computes, for each of the detected photons, a time difference between the time of irradiation of the sample with the electron and the time of emission of the photon from the sample, based on the time of detection of the electron by the electron detector and the time of detection of the photon by the photon detector, and that computes electron-photon time correlation indicating the distribution of the time difference.