Electron Spectrometer Multi-Channel Detection for Faster Spectra

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Solution Overview

Problem

Existing electron spectrometers require repetitive measurements over a range of energies, leading to prolonged measurement times due to the need for energy sweeping with a single detection element.

Innovation Solution

An electron spectrometer with a detector comprising multiple channeltrons arranged along the energy dispersion axis, allowing for simultaneous detection of electrons at different energies, and a processor that sweeps measurement energy in incremental steps, interpolates points, and generates spectral charts in smaller incremental steps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of time

If a single detection element is used to detect electrons dispersed in energy, then the device complexity is reduced, but the measurement time increases due to the need for repetitive measurements while sweeping the measurement energy

Engineering Contradiction:
Improvemeasurement timeVSAvoiddetector structure
Core Design Contradiction:
Loss of timeVSDevice complexity

Solution Approach 1:

The detector is divided into multiple detection elements (channeltrons) arranged in the direction of energy dispersion. Each detection element detects electrons within a specific energy range, allowing simultaneous detection across different energies without requiring repetitive measurements with a single element.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The detection approach transitions from a one-dimensional sequential measurement (single element sweeping through energy ranges) to a two-dimensional simultaneous detection (multiple elements detecting different energy ranges at the same time). This dimensional change enables parallel measurement of multiple energy spectra.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If multiple detection elements are used to detect electrons simultaneously at different energies, then the measurement time is reduced, but the detection sensitivity variations among channeltrons affect measurement precision

Engineering Contradiction:
Improvespectrum collection speedVSAvoiddetection sensitivity uniformity
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The system performs calibration measurements to determine the detection sensitivity characteristics of each channeltron. This calibration data is then used as feedback to correct the measured spectra, compensating for sensitivity variations and ensuring accurate quantitative analysis despite differences in individual element performance.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system adjusts measurement parameters such as the energy range assigned to each detection element and the integration time for each channel to optimize the signal-to-noise ratio while accounting for sensitivity variations. This allows the system to maintain high productivity while preserving measurement precision through parameter optimization.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces the number of measurements needed, significantly shortening the time required to collect a spectrum while minimizing the effects of detection sensitivity variations among channeltrons.

Implementation Method 1

an electron analyzer for providing energy dispersion of electrons emitted from a sample

Methodology Applied
Scientific EffectEnergy dispersion:

Implementation Method 2

a detector having a plurality of detection elements juxtaposed and arranged in the direction of energy dispersion of the electrons which have been dispersed in energy by the analyzer

Methodology Applied
Scientific EffectElectron detection and amplification: Electron Avalanche

Data Source

PatentEP4293704A1Electron spectrometer and analytical method
Publication Date: 2023.12.20 JEOL LTD
  • EP4293704A1 patent drawingFigure 1~2
  • EP4293704A1 patent drawingFigure 3~4
  • EP4293704A1 patent drawingFigure 5~8

AI summary

An electron spectrometer is provided which can collect spectra in a reduced measurement time. The electron spectrometer (100) includes an electron analyzer (30) for providing energy dispersion of electrons emitted from a sample (S), a detector (40) having a plurality of detection elements juxtaposed and arranged in the direction of energy dispersion of the dispersed electrons, and a processor (60). The processor (60) operates (i) to sweep a measurement energy in first incremental energy steps (ΔE1) within the analyzer, to detect the dispersed electrons with the detection elements, and to obtain a plurality of resulting first spectra; (ii) to interpolate points of measurement in each of the first spectra; and (iii) to generate a spectral chart in second incremental energy steps (ΔE2) smaller than the first incremental energy steps (ΔE1) on the basis of the first spectra for which the points of measurement have been interpolated.