Electron Tomography Stage Control for Tilted Multi-Point Imaging
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Solution Overview
Problem
Existing methods for collecting electron tomography data are time-consuming and lead to low sample throughput due to the need for mechanical translation and refocusing of the electron beam between imaging points.
Innovation Solution
A method and system that maintain focus of the electron beam on a sample surface while translating it at a current tilt angle, allowing data collection from multiple points without refocusing, using a translation stage that moves the sample in all X-Y-Z dimensions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the sample is mechanically translated between each tilt series collection using a translation stage, then data can be collected from multiple features separated by greater than electron beam steering distance, but the electron beam needs to be refocussed each time which is time consuming and leads to low sample throughput
Solution Approach 1:
The system performs preliminary focusing adjustments by translating the sample in the Z-direction (towards or away from the beam source) before and during the tilt series acquisition. This preliminary action maintains focus across multiple features without requiring time-consuming refocusing operations between tilt series collections, thereby improving sample throughput while preserving the ability to image widely separated features
2Reliability
If the sample is mechanically translated for every feature or point of interest, then complete tilt series data can be obtained for each feature, but a considerable amount of acquisition time is required reducing efficiency
Solution Approach 1:
The system merges multiple tilt series acquisitions into a single continuous process by translating the sample in the Z-direction to maintain focus across different features. Instead of completing one full tilt series per feature separately, the system combines the acquisition process, allowing tilt series data to be collected for multiple features in a unified workflow, thereby reducing total acquisition time while maintaining data completeness
3Ease of manufacture
If the sample is mainly flat, then electron beam focusing is easier, but accurate height information regarding features extending from the surface cannot be obtained
Solution Approach 1:
The system introduces Z-direction translation (vertical movement towards or away from the beam source) as an additional dimensional control parameter. This allows the sample to be dynamically positioned in three dimensions during acquisition, enabling both easy focusing (by adjusting Z-position) and accurate height measurement (by tracking Z-translations required to maintain focus across features with different elevations)
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces data acquisition time and improves sample throughput by eliminating the need for refocusing the electron beam during translation, while also providing more accurate height information of features using stereogrammetry.
Implementation Method 1
translating the sample at a current tilt angle... using a translation stage
Implementation Method 2
Features can interact with an electron beam and these interactions are detected and provide structural information about the samples
Data Source
Figure 1A~1B
Figure 2
Figure 3
AI summary
Method and system for obtaining electron tomography data from a sample. a) Focussing an electron beam at a first location on a surface of the sample. b) Tilting the surface of the sample to a tilt angle to the electron beam while maintaining the surface of the sample at the focus of the electron beam. c) Detecting the electron beam focussed at the first location on the surface of the sample. d) Translating the sample at the tilt angle to move the focus of the electron beam to at least a second location of the surface of the sample. e) Detecting the electron beam focussed on at least the second location on the surface of the sample. Repeating steps b) to e) at one or more different tilt angles.