Electron Beam Output Window Cooling Structure for Heat and Strength

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

The existing electron beam output window structures face issues with heat generation and strength reduction due to heat absorption by the mesh portion and window foil, leading to potential oxidation and reliability concerns.

Innovation Solution

An output window unit with a support member having a mesh portion, frame portion, and fixing portion, where the mesh portion is thin and recessed, and the frame portion is solid, integrated with a refrigerant flow path to enhance heat dissipation and strength, and a pressing member for direct cooling with a gaseous refrigerant.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If the mesh portion is made thin to improve the transmittance of an obliquely incident electron beam, then the transmittance is improved, but the strength of the support member decreases

Engineering Contradiction:

Improveelectron beam transmittanceVSAvoidstrength of support member

Core Design Contradiction:

Use of energy by moving objectVSStrength

Solution Approach 1:

The support member employs different thicknesses in different regions: the mesh portion is made thin to maximize electron beam transmittance, while the outer portion is made thick to provide structural strength and serve as an effective heat sink. This local differentiation resolves the contradiction between transmittance and strength.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The invention transitions from a uniform thickness design to a variable thickness design along the thickness dimension. By creating a stepped structure where the outer portion protrudes beyond the mesh portion, the design optimizes both electron beam transmission (thin mesh) and mechanical strength (thick outer portion) simultaneously.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Strength

If the mesh portion is made thick to maintain strength, then the strength is maintained, but the transmittance of an obliquely incident electron beam decreases

Engineering Contradiction:

Improvestrength of mesh portionVSAvoidelectron beam transmittance

Core Design Contradiction:

StrengthVSUse of energy by moving object

Solution Approach 1:

Inventive Principle:

Principle #3Local quality

3Temperature

If a flow path for refrigerant is provided in the fixing member to cool the window foil, then cooling capability is improved, but contact thermal resistance between the support member and fixing member increases

Engineering Contradiction:

Improvetemperature of window foilVSAvoidheat dissipation efficiency

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

The cooling function is integrated directly into the support member by forming the flow path within the support member itself rather than in a separate fixing member. This merging eliminates the contact thermal resistance between separate components and creates a unified heat dissipation structure.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The outer portion of the support member acts as a thermal intermediary, conducting heat from the window foil and mesh portion to the refrigerant flowing through the flow path. Its thick design ensures low thermal resistance and efficient heat transfer.

Inventive Principle:

Principle #24Intermediary (Mediator)

4Ease of manufacture

If the mesh portion and outer portion are separately formed and assembled, then manufacturing flexibility is improved, but contact thermal resistance increases

Engineering Contradiction:

Improvemanufacturing flexibilityVSAvoidheat dissipation efficiency

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The mesh portion and outer portion are formed as an integrated support member through stamping or molding, eliminating the need for separate assembly. This merging ensures perfect thermal contact between parts and eliminates contact thermal resistance that would arise from assembly interfaces.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution improves the reliability of the electron beam output window by reducing heat generation and maintaining strength, ensuring efficient heat dissipation and cooling, thereby enhancing the window's performance and durability.

Implementation Method 1

the mesh portion and the window foil absorb a part of the electron beam, thereby causing the mesh portion and the window foil to generate heat

Methodology Applied

Scientific EffectElectron beam absorption and heat generation: Electron Beam

Implementation Method 2

contact thermal resistance between the support member and the fixing member can be a factor that reduces heat dissipation of the window foil to the fixing member (refrigerant flow path) via the support member

Methodology Applied

Scientific EffectThermal conduction and convection cooling: Conduction (thermal)

Data Source

PatentUS20260045446A1Output window unit

Publication Date: 2026.02.12 HAMAMATSU PHOTONICS KK

AI summary

An output window unit includes a window foil that transmits an electron beam toward an outside of a housing; and a support member fixed to the housing and supporting the window foil. The support member includes a mesh portion which faces the window foil and in which a plurality of through-holes through which the electron beam from an electron source passes toward a window foil side are formed, a frame portion having a solid shape and formed integrally with the mesh portion to surround the mesh portion when viewed in a first direction that is a direction in which the window foil and the mesh portion face each other, an outer portion located outside the mesh portion and the frame portion when viewed in the first direction, and formed integrally with the mesh portion and the frame portion, and a recess formed to be recessed along the first direction.