Electronic Storage Vessels for Automated Material Tracking
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Solution Overview
Problem
Current material management systems in industrial processes, such as semiconductor fabrication, face inefficiencies and errors due to manual tracking and lack of dynamic communication, leading to issues with photoresist material uniformity, supply chain interruptions, and compliance with regulatory standards.
Innovation Solution
Implementing electronic information storage systems in material storage vessels to communicate supplier-specific and process tool operating parameters, enabling automated tracking and adjustment of process parameters, and correlating product information with material usage data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual tracking systems are used for material vessels, then device complexity is reduced, but reliability of material tracking and parameter communication deteriorates
Solution Approach 1:
The patent replaces manual tracking systems with electronic information storage devices (such as RFID tags or barcodes) on material vessels. These electronic systems automatically communicate material identity, batch information, and operating parameters to process tools, eliminating human error in tracking while maintaining relatively simple system architecture through standardized communication protocols.
2Measurement precision
If electronic information storage systems are implemented in material vessels, then information communication accuracy is improved, but device complexity increases
Solution Approach 1:
The patent implements multi-functional information storage devices on material vessels that simultaneously store material identity, batch information, quality parameters, and operating instructions. This universal approach improves information communication accuracy by providing comprehensive data in one system, while managing complexity through integrated design and standardized interfaces.
3Manufacturing precision
If automated parameter adjustment is implemented, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The patent employs feedback mechanisms where electronic information from material vessels is automatically read by process tools, and the system adjusts operating parameters (such as spin speed, temperature, or application rate) based on the communicated material characteristics. This automated feedback loop improves manufacturing precision by ensuring parameters match material properties, while managing complexity through algorithmic control and integration.
4Productivity
If real-time material tracking is implemented, then productivity is improved, but loss of time for system setup increases
Solution Approach 1:
The patent stores all necessary operating parameters, material specifications, and process instructions in advance within the electronic information storage devices on material vessels. When a material vessel is introduced to a process tool, the system automatically retrieves and configures parameters without manual intervention, improving productivity while minimizing setup time through pre-programmed information.
Data Source
AI summary
Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.