Electroplating Cup Seal Tapered Geometry Online Cleaning

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Solution Overview

Problem

Current closed-contact electroplating systems require labor-intensive manual cleaning processes, leading to system downtime and decreased throughput due to the need for frequent offline maintenance to remove plating solution residues.

Innovation Solution

A closed-contact electroplating cup assembly with a tapered cup design and automatic spin-rinse process that allows for rapid cleaning while the system is online, utilizing a seal and electrical contact structure that prevents contamination and facilitates efficient fluid shedding during the cleaning process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If manual cleaning process is used to remove plating solution residues, then cleaning effectiveness is improved, but system downtime increases and throughput decreases

Engineering Contradiction:
Improvecleaning effectivenessVSAvoidsystem throughput
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The cup assembly is designed to be self-cleaning through its tapered geometry. The taper angle (10-45 degrees) causes cleaning solution to flow down the walls and automatically shed water and residues without manual intervention, allowing the system to clean itself during operation

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The cleaning process occurs continuously during system operation rather than requiring periodic shutdowns. The tapered design enables constant drainage and self-cleaning action while the electroplating system remains online, eliminating interruptions to production

Inventive Principle:
Principle #20Continuity of useful action

2Reliability

If manual cleaning process is used, then plating solution residues are removed, but labor intensity and maintenance complexity increase

Engineering Contradiction:
Improvecleaning effectivenessVSAvoidmaintenance complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The tapered cup geometry provides automatic self-cleaning functionality that eliminates the need for manual disassembly, tooling, or complex cleaning procedures. The design inherently directs cleaning solution flow and residue removal through its angled walls

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The cleaning function is extracted from the main electroplating process by designing the cup geometry to independently perform self-cleaning. The tapered structure creates a separate, autonomous cleaning mechanism that operates without interfering with the primary plating operation

Inventive Principle:
Principle #2Taking out (Extraction)

3Reliability

If frequent offline maintenance is performed, then system reliability is maintained, but production time is lost

Engineering Contradiction:
Improvesystem performanceVSAvoidsystem downtime
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The self-cleaning tapered design maintains system reliability through continuous cleaning action during operation, eliminating the need to take the system offline for maintenance. Cleaning occurs continuously as part of normal operation rather than as periodic interruptions

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables frequent and efficient cleaning of the electroplating system without downtime, reducing maintenance frequency and increasing system throughput by allowing online cleaning and minimizing exposure to acidic plating solutions.

Implementation Method 1

an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom

Methodology Applied
Scientific EffectCentrifugal force: Centrifugal Force

Data Source

PatentUS8398831B2Rapidly cleanable electroplating cup seal
Publication Date: 2013.03.19 NOVELLUS SYSTEMS INC
  • US8398831B2 patent drawing
  • US8398831B2 patent drawing
  • US8398831B2 patent drawing

AI summary

Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.