Electroplating Regulating Plate for Thickness Uniformity

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Electroplating processes often suffer from poor metal coating thickness uniformity due to variations in electric field distribution affected by the substrate's upper film characteristics, leading to uneven metal coating on substrates such as circuit boards.

Innovation Solution

An electroplating apparatus with a regulating plate featuring an insulation grid plate and wires, where a controller adjusts the electromagnetic field around the wires to control the incident angle of electric lines of force, ensuring consistent electric field density across the substrate by managing the Lorentz force interaction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If traditional electroplating is performed without field regulation, then the process is simple and fast, but the metal coating thickness uniformity is poor

Engineering Contradiction:
Improvemetal coating thickness uniformityVSAvoidelectroplating apparatus structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

A regulating plate with wires is introduced as an intermediary component between the anode and cathode. This regulating plate modifies the electric field distribution by providing additional wire elements that interact with the electric lines of force, thereby improving metal coating thickness uniformity without fundamentally changing the basic electroplating apparatus structure

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention changes the electric field parameters by introducing a regulating plate with adjustable wires. The position and configuration of these wires can be modified to optimize electric field distribution, allowing control over metal coating thickness uniformity while maintaining relatively simple apparatus operation

Inventive Principle:
Principle #35Parameter changes

2Productivity

If the electric lines of force are close to the substrate to be plated, then the electroplating process is efficient, but the electric lines of force are affected by the upper film layer characteristics and turned, resulting in uneven distribution

Engineering Contradiction:
Improveelectroplating efficiencyVSAvoidelectric line of force density distribution
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The regulating plate provides locally differentiated field regulation through its wire configuration. Different regions of the regulating plate can be adjusted to compensate for local variations caused by upper film layer characteristics, ensuring uniform electric line of force density distribution while maintaining high electroplating efficiency

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If a regulating plate with wires is introduced to control electric field distribution, then the metal coating thickness uniformity is improved, but the device complexity increases

Engineering Contradiction:
Improveelectroplating thickness uniformityVSAvoidregulating plate structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The regulating plate is segmented into multiple independent wires that can be individually adjusted. This segmentation allows precise control over electric field distribution in different regions, improving electroplating thickness uniformity while keeping each individual wire component simple and the overall structure modular

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively alleviates the issue of poor electroplating thickness uniformity by controlling the number of electric lines of force entering different openings on the substrate, resulting in a consistent metal coating thickness and improved operating freedom.

Implementation Method 1

The controller is electrically connected to the plurality of wires to control a state of an electromagnetic field around the plurality of wires

Methodology Applied
Scientific EffectLorentz force: Lorentz Force

Implementation Method 2

After the power supply supplies a power, a plurality of electric lines of force moving from the anode to the cathode are formed

Methodology Applied
Scientific EffectElectric field: Electric Field

Implementation Method 3

Electroplating has been widely used in various fields. In addition to being traditionally used as a surface treatment method

Methodology Applied
Scientific EffectElectroplating: Electroplating

Implementation Method 4

A metal coating is formed on the substrate to be plated

Methodology Applied
Scientific EffectElectrodeposition: Electrodeposition

Data Source

PatentUS11859302B2Electroplating apparatus and electroplating method
Publication Date: 2024.01.02 UNIMICRON TECH CORP
  • US11859302B2 patent drawing
  • US11859302B2 patent drawing
  • US11859302B2 patent drawing

AI summary

An electroplating apparatus includes an anode and a cathode, a power supply, a regulating plate, and a controller. The power supply is electrically connected to the anode and the cathode. The regulating plate is disposed between the anode and the cathode. The regulating plate includes an insulation grid plate and a plurality of wires. The controller is electrically connected to the plurality of wires to control a state of an electromagnetic field around the plurality of wires. An electroplating method is also provided.