Electrostatic Actuator Low Voltage Noise Durability
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Solution Overview
Problem
Conventional electrostatic actuators require high driving voltages and are vulnerable to noise, making reliable and consecutive operation challenging due to weak restoring forces needed for low voltage actuation.
Innovation Solution
An electrostatic actuator design featuring a fixed electrode, an electric charge charging unit insulated from the fixed electrode, and a moving electrode, where the moving electrode is actuated by first and second electrostatic forces between the fixed electrode and the electric charge charging unit, allowing for low driving voltage operation and improved durability against noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If the restoring force of the support member is designed weakly to enable low voltage actuation, then the driving voltage is reduced, but the support member becomes vulnerable to noise and durability is compromised
Solution Approach 1:
The invention introduces an electric charge charging unit that is charged in advance with electric charges. This preliminary charging creates a strong electrostatic attraction force that can reliably overcome noise and external disturbances, enabling the support member to maintain sufficient restoring force while still allowing low voltage actuation during normal operation.
Solution Approach 2:
The invention changes the electrostatic field parameters by introducing a pre-charged electric charge charging unit. This creates a strong initial electrostatic attraction that provides reliable operation against noise, while the actuation voltage can be kept low because the primary holding force comes from the pre-stored electric charges rather than continuous high voltage application.
2Force
If high voltage is applied to achieve strong electrostatic attraction, then the actuation force is sufficient, but the driving voltage requirement increases
Solution Approach 1:
The electric charge charging unit is charged in advance to store electrostatic energy. This preliminary action creates a strong electrostatic attraction force without requiring continuous high voltage application during actuation, thereby reducing the driving voltage requirement while maintaining sufficient actuation force.
Solution Approach 2:
The electric charge charging unit acts as an intermediary that stores and provides electric charges to create electrostatic attraction. This intermediary mechanism allows the system to achieve strong electrostatic forces through the stored charges rather than direct high voltage application, reducing the energy input requirement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable and consecutive operation with low driving voltage and enhanced durability against external noise by using previously charged electric charges in the electric charge charging unit to control the actuation, reducing the need for weak restoring forces.
Implementation Method 1
the moving electrode is moved by means of a first electrostatic force between the fixed electrode and the moving electrode and a second electrostatic force between the electric charge charging unit and the moving electrode
Data Source
AI summary
The present invention relates to a micro-electromechanical system (MEMS) and, more particularly, to an electrostatic actuator, and a driving method thereof and an application device thereof. The electrostatic actuator in accordance with the present invention comprises a fixed electrode, an electric charge charging unit electrically insulated from the fixed electrode, and a moving electrode spaced apart from the fixed electrode and the electric charge charging unit. In accordance with the present invention, the electrostatic actuator with a very low driving voltage and an arbitrarily controllable driving voltage when compared with a conventional electrostatic actuator is provided. In addition, the electrostatic actuator having durability against external noise and enabling a reliable consecutive operation is provided. Further, in accordance with the present invention, non-volatile mechanical memory, a logic circuit and a switch employing the electrostatic actuator are provided.