Electrostatic Attractor Shield for Plasma Processing Erosion
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Solution Overview
Problem
In plasma processing apparatuses, the electrostatic attractor is susceptible to erosion and abrasion due to radicals or gases intruding from gas discharge holes, which can lead to reduced accuracy in temperature adjustment and plasma processing.
Innovation Solution
A shield is interposed between the electrode and the gas plate, physically connecting gas discharge holes and gas flow passages, and optionally using a connector or passivation layers to prevent radicals or gases from reaching the electrostatic attractor, while also applying voltages with different polarities to the electrostatic attractor during idle and plasma generation periods to control attraction and temperature adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the electrostatic attractor is exposed to radicals or gases from gas discharge holes, then plasma generation is enabled, but erosion and abrasion of the electrostatic attractor occur
Solution Approach 1:
A shield is introduced as an intermediary component between the gas discharge holes and the electrostatic attractor. The shield physically blocks radicals and gases from reaching the electrostatic attractor during plasma generation, while allowing the electrostatic attraction function to remain effective. This mediator structure resolves the contradiction by protecting the attractor from erosion while maintaining plasma generation capability.
2Manufacturing precision
If the electrode is attracted to the gas plate during idle period, then temperature adjustment is improved, but erosion from radicals or gases occurs
Solution Approach 1:
The shield serves as a protective intermediary that allows the electrode to be attracted to the gas plate for temperature adjustment during idle periods while preventing direct exposure to erosive radicals and gases. The shield blocks the harmful factors from reaching the electrode-gas plate interface, enabling accurate temperature control without degradation from erosion.
3Device complexity
If no protection is provided for the electrostatic attractor, then device complexity is reduced, but erosion and abrasion reduce processing accuracy
Solution Approach 1:
The shield is a relatively simple intermediary structure that protects the electrostatic attractor from erosion, thereby maintaining plasma processing accuracy over time. While it adds a component to the system, the shield's simple geometry and integration with existing structures minimizes the increase in overall device complexity while providing substantial protection against degradation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The shield effectively prevents erosion of the electrostatic attractor, maintains accuracy in temperature adjustment, and enhances the efficiency of plasma processing by controlling the electrostatic attraction and temperature management.
Implementation Method 1
an electrostatic attractor having a first electrode and a second electrode
Implementation Method 2
A shield is interposed between the electrode and the gas plate, physically connecting gas discharge holes and gas flow passages
Implementation Method 3
In the plasma generation period, plasma is generated by the plasma processing apparatus
Data Source
AI summary
A method for controlling an electrostatic attractor, which attracts an electrode to a gas plate provided in an upper portion of a plasma processing apparatus, includes, among a plasma generation period in which plasma is generated by the plasma processing apparatus and an idle period in which no plasma is generated by the plasma processing apparatus, applying voltages having polarities different from each other to first and second electrodes of the electrostatic attractor in at least the idle period.