Electrostatic Chuck Capacitance Measurement Using Current Slope
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Solution Overview
Problem
Existing methods for measuring electrostatic capacitance of electrostatic chucks are not effective in determining the electrical connection and capacitance accurately, which affects the attraction state and operation of substrate processing apparatuses.
Innovation Solution
A measurement method involving a terminal connected to an electrostatic chuck, with an ammeter and voltmeter to measure current and voltage values, determining electrical connection based on current slope and peak values, and calculating electrostatic capacitance using these measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional detection devices and comparison circuits are used to measure electrostatic capacitance, then the measurement process can be implemented, but the accuracy in determining electrical connection and capacitance values is insufficient
Solution Approach 1:
The patent replaces conventional electrical measurement circuits with a mechanical-like approach using a measuring jig that physically contacts the electrostatic chuck terminal. By using direct electrical contact through a terminal and measuring current-voltage characteristics with an ammeter and voltmeter, the system achieves more reliable determination of electrical connection status and capacitance values, substituting complex circuit-based detection with a simpler, more direct measurement method.
2Productivity
If existing electrostatic capacitance monitoring circuits are used, then continuous monitoring can be performed, but the ability to accurately determine attraction state and electrical connection is limited
Solution Approach 1:
The patent implements a feedback mechanism where the measured current and voltage values are used to calculate electrostatic capacitance in real-time. The system continuously monitors the electrical characteristics between the terminal and ground, uses the measured values to determine capacitance and attraction state, and can provide feedback for controlling the substrate processing apparatus. This feedback loop enables both continuous monitoring and accurate determination of the electrostatic chuck's operational state.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method provides accurate determination of electrostatic capacitance and attraction force, enabling effective operation and maintenance of substrate processing apparatuses by ensuring reliable electrical connections and capacitance measurements.
Implementation Method 1
measuring a current value and a voltage value using an ammeter and a voltmeter, respectively, that are connected to the terminal, respectively
Implementation Method 2
an electrode in an electrostatic chuck in contact with a substrate that is grounded
Implementation Method 3
an attraction state is checked by comparing data detected by the detection device and pre-stored data
Data Source
AI summary
In a measurement method, a terminal is brought into contact with an electrode in an electrostatic chuck in contact with a substrate that is grounded. Further, the terminal, the electrostatic chuck and the substrate are fixed, and a current value and a voltage value are measured using an ammeter and a voltmeter, respectively, that are connected to the terminal. In addition, whether or not the terminal and the electrode are electrically connected is determined from a slope of the current value and/or a peak current value based on the measured current value and the voltage value.