Electrostatic Chuck Laminate With Water-Soluble Ceramic Release Layer
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Solution Overview
Problem
Conventional methods for removing ceramic layers from laminates in plasma processing often damage other components, making it difficult to reuse the laminates.
Innovation Solution
A laminate structure is developed with a water-soluble resin intermediate layer containing ceramic particles, allowing the ceramic layer to be easily detached by immersion in water without damaging other components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of substance
If chemical cleaning solution is used to remove the ceramic layer, then the ceramic layer can be removed, but other components of the laminate are deformed or thinned
Solution Approach 1:
The intermediate layer serves as a mediator that enables selective ceramic layer removal. It is designed to be water-soluble, allowing water to penetrate through the ceramic layer and dissolve the intermediate layer, facilitating ceramic layer detachment without exposing other components to harmful chemical cleaning solutions.
Solution Approach 2:
The invention replaces the chemical cleaning solution process with a water-based dissolution mechanism. Instead of using aggressive chemicals that can deform or thin other components, water is used to dissolve the water-soluble intermediate layer, providing a gentler and more precise removal process.
2Loss of substance
If blasting or chemical cleaning solution treatment is used, then the ceramic layer can be removed, but the work becomes cumbersome
Solution Approach 1:
The invention replaces complex mechanical blasting processes and cumbersome chemical cleaning procedures with a simple water immersion process. Water penetrates the ceramic layer and dissolves the water-soluble intermediate layer, causing the ceramic layer to detach automatically, significantly simplifying the removal operation.
Solution Approach 2:
The intermediate layer is designed to automatically dissolve when water penetrates the ceramic layer, enabling the ceramic layer to self-detach without requiring additional manual intervention or complex processing steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the ceramic layer to be removed without harming other components, facilitating the reuse of laminates and reducing waste.
Implementation Method 1
the intermediate layer dissolves by water penetrating the ceramic layer
Data Source
AI summary
The purpose of the present invention is to provide a laminate coated with a ceramic layer and an electrostatic chuck device, wherein the ceramic layer can be detached without damaging any member other than the ceramic layer. The present invention provides a laminate formed by stacking a member, an intermediate layer (50), and a ceramic layer (60), in which the intermediate layer (50) is a water-soluble resin containing ceramic particles, and an electrostatic chuck device (1) formed by stacking a base (10), insulating organic films (41, 42), an intermediate layer (50) and a ceramic layer (60), in which the intermediate layer (50) is a water-soluble resin containing ceramic particles.