Electrostatic Chuck Cooling Channels for Temperature Uniformity
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Solution Overview
Problem
Existing electrostatic chucks exhibit poor cooling performance and significant temperature variation of adsorbed objects due to the inefficiency of cooling gas supply.
Innovation Solution
The electrostatic chuck design includes an internal electrode with cooling flow paths extending in a direction different from its thickness, surrounded by dielectric layers, with a cross-sectional area of the flow paths covering at least 30% of the internal electrode area, and featuring a second cooling flow path through the electrode in the thickness direction, enhancing coolant distribution and heat dissipation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If cooling gas is supplied between the adhesive surface and the adsorbed object, then cooling function is provided, but cooling performance is poor and temperature variation is large
Solution Approach 1:
The cooling flow path extends in the thickness direction (vertical dimension) rather than only in the plane direction, creating a three-dimensional cooling structure that improves heat dissipation efficiency and temperature uniformity across the adsorbed object surface
Solution Approach 2:
The internal electrode is divided into multiple regions with different cooling flow path densities, allowing differential cooling control in different areas to achieve more uniform temperature distribution across the entire adsorbed object
2Area of stationary object
If the cooling flow path extends in the layer direction, then cooling coverage is improved, but the structural complexity increases
Solution Approach 1:
The internal electrode serves dual functions: as the electrostatic attraction electrode and as the housing for the cooling flow path, eliminating the need for separate cooling channel structures and reducing overall device complexity
Solution Approach 2:
The cooling flow path is integrated within the internal electrode structure itself, merging the electrostatic function and cooling function into a single component, thereby simplifying the overall device architecture
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively suppresses temperature variation of the adsorbed object by improving cooling efficiency and response time, ensuring stable temperature control.
Implementation Method 1
When a voltage is applied to an internal electrode of the electrostatic chuck, a potential difference is generated between the adsorbed object and the conductive support member, which results in electrostatic adhesion between the dielectric layers
Implementation Method 2
The internal electrode has a cooling flow path extending in a direction different from the thickness direction... This design effectively suppresses temperature variation of the adsorbed object by improving cooling efficiency
Data Source
Figure 1
Figure 2
Figure 3~4
AI summary
Provided is an electrostatic chuck capable of suppressing a temperature variation of an adsorbed object. The electrostatic chuck includes an internal electrode (13) having a thickness, and dielectric layers (resin layers (12), ceramic layers (14), and the like) provided on both sides of the internal electrode (13) in a thickness direction, and the internal electrode (13) has a cooling flow path (20) extending in a direction different from the thickness direction.